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arXiv · 2107.04484

Real-time sensing with multiplexed optomechanical resonators

Fabrice Lamberti·Ujwol Palanchoke·Thijs Geurts·Marc Gely·Sebastien Regord·Louise Banniard·Marc Sansa·Ivan Favero·Guillaume Jourdan·Sebastien Hentz
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Abstract

Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size at the cost of low capture area, making the "needle in a haystack" issue acute. This leads to poor instrument sensitivity and long analysis time. Moreover, electrical transductions are limited in frequency, which limits the achievable mechanical bandwidth again limiting throughput. Multiplexing a large number of high-frequency resonators appears as a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks resonators fabricated through a Very Large Scale Integration process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way towards the realization of sensors for multi-parametric analysis, extremely low limit of detection and response time.

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Fabrice Lamberti, Ujwol Palanchoke, Thijs Geurts, Marc Gely, Sebastien Regord, Louise Banniard, Marc Sansa, Ivan Favero, Guillaume Jourdan, Sebastien Hentz. 2021-07-09. Real-time sensing with multiplexed optomechanical resonators. https://doi.org/10.1021/acs.nanolett.1c04017

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