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arXiv · 2111.02884

Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits

Aleksandr V. Tronev·Mikhail V. Parfenov·Sergey I. Bozhko·Andrey M. Ionov·Rais N. Mozhchil·Sergey V. Chekmazov·Petr M. Agruzov·Igor V. Ilichev·Aleksandr V. Shamrai
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Abstract

Local laser oxidation of a thin titanium film is considered as a means of a precise adjustment of losses and effective refractive index of dielectric optical waveguides. A fine phase control of an operating point and extinction ratio enhancement up to 57 dB were demonstrated using an integrated optical Ti:LiNbO3 Mach-Zehnder modulator. This technique only slightly affects the dielectric waveguide material and is very promising for a high precision permanent trimming of photonic devices based on dielectric waveguides of different material platforms and fabrication technologies.

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Aleksandr V. Tronev, Mikhail V. Parfenov, Sergey I. Bozhko, Andrey M. Ionov, Rais N. Mozhchil, Sergey V. Chekmazov, Petr M. Agruzov, Igor V. Ilichev, Aleksandr V. Shamrai. 2022-09-24. Local laser oxidation of titanium film for post-fabrication trimming of photonic integrated circuits. https://doi.org/10.1364/ome.465690

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