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arXiv · 2111.06746

Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy

Pengfei Nan·Zhiyao Liang·Yue Zhang·Yangrui Liu·Dongsheng Song·Binghui Ge
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Abstract

Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging, for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for determining thickness in scanning transmission electron microscopy (STEM) mode based on scanning moir\'e fringe (SMF). Sample thickness can be determined in situ in the medium magnification using focal-series SMF imaging, with beam damage and contamination avoided to a large extent. This method provides a fast and convenient way for determining thickness in TEM imaging, which is particularly useful for beam-sensitive materials such as Metal-Organic Frameworks.

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Pengfei Nan, Zhiyao Liang, Yue Zhang, Yangrui Liu, Dongsheng Song, Binghui Ge. 2021-11-12. Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy. https://arxiv.org/abs/2111.06746

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