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arXiv · 2112.07976

Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

Maximilian Protte·Varun B. Verma·Jan Philipp Höpker·Richard P. Mirin·Sae Woo Nam·Tim J. Bartley
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Abstract

We demonstrate the fabrication of micron-wide tungsten silicide superconducting nanowire single-photon detectors on a silicon substrate using laser lithography. We show saturated internal detection efficiencies with wire widths from 0.59$\mu$m to 1.43$\mu$m under illumination at 1550nm. We demonstrate both straight wires, as well as meandered structures. Single-photon sensitivity is shown in devices up to 4mm in length. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1$\mu$m.

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Maximilian Protte, Varun B. Verma, Jan Philipp Höpker, Richard P. Mirin, Sae Woo Nam, Tim J. Bartley. 2021-12-15. Laser-lithographically written micron-wide superconducting nanowire single-photon detectors. https://doi.org/10.1088/1361-6668/ac5338

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