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arXiv · 2212.05704

Recycling of Perovskite Substrate

Jie Wang·Yuhan Liang·Yue Wang·Shengan Yang·Xinyu Zhang·Xin Huang·Yajuan Wang·Zhaowei Liang·Ji Ma·Hui Zhang·Qingming Chen·Jing Ma·Yuanhua Lin·Liang Wu
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Abstract

The use of water-soluble sacrificial layer of Sr$_3$Al$_2$O$_6$ has tremendously boosted the research on freestanding functional oxide thin films, especially thanks to its ultimate capability to produce high-quality epitaxial perovskite thin films. However, the costly single-crystalline substrates, e.g. SrTiO$_3$, were generally discarded after obtaining the freestanding thin films. Here, we demonstrate that the SrTiO$_3$ substrates can be recycled to fabricate La$_{0.7}$Sr$_{0.3}$MnO$_3$ films with nearly identical structural and electrical properties. After attaining freestanding thin films, the residues on SrTiO$_3$ can be removed by 80 \degree C hot water soaking and rinsing treatments. Consequently, the surface of SrTiO$_3$ reverted to its original step-and-terrace structure.

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Jie Wang, Yuhan Liang, Yue Wang, Shengan Yang, Xinyu Zhang, Xin Huang, Yajuan Wang, Zhaowei Liang, Ji Ma, Hui Zhang, Qingming Chen, Jing Ma, Yuanhua Lin, Liang Wu. 2022-12-12. Recycling of Perovskite Substrate. https://doi.org/10.1002/admi.202202111

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