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arXiv · 2212.12369

A compact and versatile cryogenic probe station for quantum device testing

Mathieu de Kruijf·Simon Geyer·Toni Berger·Matthias Mergenthaler·Floris Braakman·Richard J. Warburton·Andreas V. Kuhlmann
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Abstract

Fast feedback from cryogenic electrical characterization measurements is key for the development of scalable quantum computing technology. At room temperature, high-throughput device testing is accomplished with a probe-based solution, where electrical probes are repeatedly positioned onto devices for acquiring statistical data. In this work we present a probe station that can be operated from room temperature down to below 2$\,$K. Its small size makes it compatible with standard cryogenic measurement setups with a magnet. A large variety of electronic devices can be tested. Here, we demonstrate the performance of the prober by characterizing silicon fin field-effect transistors as a host for quantum dot spin qubits. Such a tool can massively accelerate the design-fabrication-measurement cycle and provide important feedback for process optimization towards building scalable quantum circuits.

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Mathieu de Kruijf, Simon Geyer, Toni Berger, Matthias Mergenthaler, Floris Braakman, Richard J. Warburton, Andreas V. Kuhlmann. 2022-12-23. A compact and versatile cryogenic probe station for quantum device testing. https://doi.org/10.1063/5.0139825

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