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arXiv · 2501.10424

X-ray diffraction characterization of suspended structures for MEMS applications

P. Goudeau·N. Tamura·B. Lavelle·S. Rigo·T. Masri·A. Bosseboeuf·T. Sarnet·J. -A. Petit·J. -M. Desmarres
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Abstract

Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex structures at sub micron scales. Two types of MEMS structure have been studied: a bilayer cantilever composed of a gold film deposited on poly-silicon and a boron doped silicon bridge. X-ray diffraction results are discussed in view of numerical simulation experiments.

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P. Goudeau, N. Tamura, B. Lavelle, S. Rigo, T. Masri, A. Bosseboeuf, T. Sarnet, J. -A. Petit, J. -M. Desmarres. 2025-01-10. X-ray diffraction characterization of suspended structures for MEMS applications. https://arxiv.org/abs/2501.10424

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