Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films

Nicola Manca; Dhavalkumar Mungpara; Leonélio Cichetto Jr.; Alejandro E. Plaza; Gianrico Lamura; Alexander Schwarz; Daniele Marré; Luca Pellegrino

doi:10.1021/acssensors.5c00448

arXiv · 2501.12177

Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films

Nicola Manca·Dhavalkumar Mungpara·Leonélio Cichetto Jr.·Alejandro E. Plaza·Gianrico Lamura·Alexander Schwarz·Daniele Marré·Luca Pellegrino

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Abstract

Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex fabrication protocols. We present a different approach relying on (La0.7,Sr0.3)MnO3 (LSMO), an oxide compound that works both as structural element for the resonator and functional magnetic layer. Suspended trampolines are realized in a single step process from LSMO thin films and show quality factor up to 60k and fQ products reaching 10$^{10}$ Hz. Their magnetic properties are probed by a SQUID magnetometer and magnetic force microscopy, showing saturation magnetization of 240 kA/m at room temperature and in-plane magnetic domains with coercivity of 2.5 mT. Being entirely made from a magnetic material, these resonators exhibit a larger magnetic interaction volume compared to other solutions, making them ideal candidates as building blocks for high-sensitivity magnetic field sensors.

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Nicola Manca, Dhavalkumar Mungpara, Leonélio Cichetto Jr., Alejandro E. Plaza, Gianrico Lamura, Alexander Schwarz, Daniele Marré, Luca Pellegrino. 2025-01-21. Magnetic Trampoline Resonators from (La,Sr)MnO3 Single-Crystal Thin Films. https://doi.org/10.1021/acssensors.5c00448

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