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arXiv · 2504.04623

Characterization of NbTiN/HZO/NbTiN MIM Capacitors for high frequency AC Clock & Power Distribution Network for Superconducting Digital Circuits

Seifallah Ibrahim·Blake Hodges·Steven Brebels·Julian Gil Pinzon·Trent Josephsen·Ankit Pokhrel·Daniel Perez Lozano·Yann Canvel·Bart Kenens·Amey M. Walke·Gianpiero Maccarrone Lapi·Sara Iraci·Mihaela Popovici·Benjamin Huet·Quentin Herr·Zsolt Tőkei·Anna Herr
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Abstract

A resonant clock-power distribution network is critical for scaling energy efficient superconducting digital technology to practical high integration density circuits. High-k, tunable capacitors enable implementation of a resonant power delivery network supporting circuits with up to 400 Mdevices/cm2. We report the cryogenic characterization of Metal-Insulator-Metal capacitors using a Hafnium Zirconium Oxide (HZO) ferroelectric insulating layer and Niobium Titanium Nitride (NbTiN) superconducting electrodes. The fabricated chip includes capacitor arrays for low frequency characterization and a half-wave transmission line resonator for RF characterization. A specific capacitance of 3 uF/cm2, DC leakage current of 10-8 A/cm2 at 2 V and a constant 5 percent tunability up to 4 GHz were measured at 2.6 K.

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Seifallah Ibrahim, Blake Hodges, Steven Brebels, Julian Gil Pinzon, Trent Josephsen, Ankit Pokhrel, Daniel Perez Lozano, Yann Canvel, Bart Kenens, Amey M. Walke, Gianpiero Maccarrone Lapi, Sara Iraci, Mihaela Popovici, Benjamin Huet, Quentin Herr, Zsolt Tőkei, Anna Herr. 2025-04-06. Characterization of NbTiN/HZO/NbTiN MIM Capacitors for high frequency AC Clock & Power Distribution Network for Superconducting Digital Circuits. https://arxiv.org/abs/2504.04623

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