Design optimization of silicon nitride nanomechanical resonators for thermal infrared detectors: a guide through key figures of merit

Abstract

Thermomechanical infrared (IR) detectors have emerged as promising alternatives to traditional photon and thermoelectric sensors, offering broadband sensitivity and low noise without the need for cryogenic cooling. Despite recent advances, the field still lacks a unified framework to guide the design of these nanomechanical systems. This work addresses that gap by providing a comprehensive design guide for IR thermal detectors based on silicon nitride drumhead and trampolines. Leveraging a validated analytical model, we systematically explore how geometry, tensile stress, and optical properties influence key performance metrics such as thermal time constant, noise-equivalent power, and specific detectivity. The analysis encompasses both bare silicon nitride and structures with broadband absorber layers, revealing how different parameter regimes affect the trade-off between sensitivity and response speed. Rather than focusing on a single device architecture, this study maps out a broad design space, enabling performance prediction and optimisation for a variety of application requirements. As such, it serves not only as a reference for benchmarking existing devices but also as a practical tool for engineering next-generation IR sensors that can operate close to the fundamental detection limit. This work is intended as a foundational resource for researchers and designers aiming to tailor IR detectors to specific use cases.