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arXiv · 2511.02166

Fabrication and characterization of high-Q silicon nitride membrane resonators

Atkin D. Hyatt·Oscar A. Flores·Aman R. Agrawal·Charles A. Condos·Dalziel J. Wilson
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Abstract

Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal engineering techniques. Fabrication and characterization of silicon nitride membranes has become a form of tacit knowledge in optomechanics research groups. Here we present a video run-through of the design, fabrication, and characterization of a contemporary silicon nitride membrane resonator (specifically, a centimeter-scale Si3N4 nanoribbon supporting $Q>10^8$ torsion modes). Our tutorial can serve as a starting point or refresher for practitioners in the field.

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Atkin D. Hyatt, Oscar A. Flores, Aman R. Agrawal, Charles A. Condos, Dalziel J. Wilson. 2025-11-04. Fabrication and characterization of high-Q silicon nitride membrane resonators. https://doi.org/10.3791/68706

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