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arXiv · 2604.16150

High-yield fabrication of micromirror templates via feedback-controlled laser ablation

Daniel Allepuz-Requena·Jonas Schou Neergard-Nielsen·Alexander Huck·Ulrik Lund Andersen
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Abstract

We present a high-yield method for fabricating concave micromirror templates in silica using feedback-controlled CO2 laser ablation with precise in situ positioning. Real-time monitoring of the white-light emission generated during ablation is used to terminate laser exposure, thereby reducing shot-to-shot variability in mirror depth and radius of curvature. To ensure reproducible single-shot processing across different substrates, the sample position relative to the laser focus is calibrated using an in situ phase-scanning interferometric microscope integrated into the fabrication workflow. The method enables reliable fabrication of shallow mirror templates with tunable radii of curvature spanning from approximately 20$\mathrm{\mu m}$ to several hundred micrometers, with relative geometric variances as low as 3%. The suitability of the fabricated mirrors for optical resonators is verified by realizing a compact plano-concave Fabry--Perot microcavity with a finesse of 37000 at telecom wavelengths. The setup provides a simple and automated route to reproducible micromirror fabrication for applications in cavity quantum electrodynamics and cavity optomechanics.

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Daniel Allepuz-Requena, Jonas Schou Neergard-Nielsen, Alexander Huck, Ulrik Lund Andersen. 2026-04-17. High-yield fabrication of micromirror templates via feedback-controlled laser ablation. https://doi.org/10.1063/5.0339359

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