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arXiv · 2606.02736

Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform

Shahid Rauf·Tianhong Wang·Jason Kenney·Dmytro Sydorenko·Igor D. Kaganovich
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Abstract

Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on plasma characteristics, collision processes, and the electron velocity distribution function driven by asymmetric triangular waveform current.

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Shahid Rauf, Tianhong Wang, Jason Kenney, Dmytro Sydorenko, Igor D. Kaganovich. 2026-06-01. Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform. https://arxiv.org/abs/2606.02736

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