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Near-Field Scanning Microwave Microscopy: Measuring Local Microwave Properties and Electric Field Distributions

B. J. Feenstra·C. P. Vlahacos·Ashfaq S. Thanawalla·D. E. Steinhauer·S. K. Dutta·F. C. Wellstood·Steven M. Anlage
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Abstract

We describe the near-field microwave microscopy of microwave devices on a length scale much smaller than the wavelength used for imaging. Our microscope can be operated in two possible configurations, allowing a quantitative study of either material properties or local electric fields.

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B. J. Feenstra, C. P. Vlahacos, Ashfaq S. Thanawalla, D. E. Steinhauer, S. K. Dutta, F. C. Wellstood, Steven M. Anlage. 1998-03-04. Near-Field Scanning Microwave Microscopy: Measuring Local Microwave Properties and Electric Field Distributions. https://doi.org/10.1109/mwsym.1998.705152

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