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Mechanical Dissipation in Silicon Flexures

S. Reid·G. Cagnoli·D. R. M. Crooks·J. Hough·P. Murray·S. Rowan·M. M. Fejer·R. Route·S. Zappe
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Abstract

The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick <110> single-crystal silicon cantilevers has been observed over the temperature range 85 K to 300 K, with dissipation approaching levels down to phi = 4.4E-7.

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S. Reid, G. Cagnoli, D. R. M. Crooks, J. Hough, P. Murray, S. Rowan, M. M. Fejer, R. Route, S. Zappe. 2005-10-28. Mechanical Dissipation in Silicon Flexures. https://doi.org/10.1016/j.physleta.2005.10.103

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