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Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses

Saulius Juodkazis·Toshiaki Kondo·Vygantas Mizeikis·Shigeki Matsuo·Hiroaki Misawa·Egidijus Vanagas·Igor Kudryashov
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Abstract

We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic recording, and light-induced damage in transparent dielectric materials. Both techniques use nonlinear optical excitation of materials by ultrashort laser pulses (duration < 1 ps).

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Saulius Juodkazis, Toshiaki Kondo, Vygantas Mizeikis, Shigeki Matsuo, Hiroaki Misawa, Egidijus Vanagas, Igor Kudryashov. 2002-05-09. Microfabrication of Three-Dimensional Structures in Polymer and Glass by Femtosecond Pulses. https://arxiv.org/abs/physics/0205025

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