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Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography

X. Liu·K. -H. Brenner·M. Wilzbach·M. Schwarz·T. Fernholz·J. Schmiedmayer
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Abstract

We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.

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X. Liu, K. -H. Brenner, M. Wilzbach, M. Schwarz, T. Fernholz, J. Schmiedmayer. 2006-08-22. Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography. https://doi.org/10.1364/ao.44.006857

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