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Luis Guillermo Villanueva

Publications and source records attributed to Luis Guillermo Villanueva.

At least 19 recordsLinked to original sources
arXiv2026

Bilayer Lithium Niobate Acoustic Resonators for Spurious-Free Wideband Operation at 6 GHz

The evolution of wireless communication standards toward higher frequencies and wider bandwidths places increasing demands on acoustic filter technologies. Conventional resonators face scaling limitations above 5 GHz, where lithographic constraints, reduced electromechanical coupling coefficient (k2eff), and spurious mode excitation hinder practical filter implementation. Here, we introduce a bilayer X-cut lithium niobate (LiNbO3) thickness-shear bulk acoustic resonator architecture that leverages symmetry engineering as a new design degree of freedom. By vertically stacking two piezoelectric thin films with a tailored bonding angle, the second-order thickness-shear mode (SH2, slow) is selectively excited. Furthermore, the fast thickness-shear modes inherent to X-cut LiNbO3 are suppressed, yielding a spurious-free in-band response. Devices operating around 6 GHz demonstrate a k2eff of approximately 35%, in close agreement with finite-element simulations and confirming the symmetry-driven mode selection mechanism. Proof-of-concept ladder filters demonstrate a fractional bandwidth of 18.6%, highlighting the wideband capabilities of the proposed architecture. The proposed configuration enables thickness-defined frequency scaling while maintaining high coupling and spectral purity, offering a promising platform for wideband radiofrequency filters in next-generation wireless systems.

physics.app-ph↗
arXiv2026

Backward-Wave Difference-Frequency Generation in Thin-Film Lithium Niobate

Second-order nonlinear processes involving counter-propagating light generation have been explored for quantum applications and optical parametric oscillators. However, realizing these processes on integrated photonic platforms such as thin-film lithium niobate (TFLN) remains challenging because of the extremely short quasi-phase matching (QPM) periods required, which are difficult to achieve with standard fabrication workflows. In this work, we achieve 1425 nm periodicity on 800 nm-thick X-cut TFLN via poling prior to etching. We present the first integrated demonstration of backward-wave difference-frequency generation (BWDFG), using a pump near 775 nm and a counter-propagating signal near 1980 nm, and thereby combine the high nonlinear efficiency of QPM with favorable dispersion characteristics. Within the same waveguide, we demonstrate backward-wave second-harmonic generation (BWSHG), where the pump and second-harmonic are counter-propagating, together with BWDFG. Idler generation spans from 1244 nm to 1290 nm and simulations predict extended coverage up to ~2200 nm. This process provides broad spectral tunability while remaining tolerant of fabrication-induced dimensional offsets, addressing a key challenge for the TFLN platform.

physics.optics↗
arXiv2026

Test of a 34 GHz EOM laser frequency comb at ESPRESSO

Laser frequency combs (LFCs) are a promising technology for wavelength calibration of astronomical high-resolution spectrographs requiring utmost accuracy and stability, since they directly translate the fundamental SI time standard from the radio frequency regime to optical frequencies. However, they have so far seen limited use in practice, due to their complexity, incomplete wavelength coverage, but also the challenges in the data analysis they imply. Here, we present a detailed test of a 34 GHz electro-optic modulation comb with the ESPRESSO spectrograph. Using thin-film lithum-niobate waveguides for broadening and harmonic generation, the setup provides partial coverage of the IR, visible, and near-UV spectral ranges. We focus on assessing the quality of the delivered spectra and their capability to facilitate accurate and stable wavelength calibration. We present a detailed analysis of the spectrally-diffuse background, the line width, and characterize the line-spread function over a broader width than possible with the ESPRESSO facility LFC. Comparing both combs, we find strong local discrepancies in the wavelength calibration accuracy up to 15m/s , which correlate with the echellogram structure. These do not originate from the lasers, but from misalignments in the ESPRESSO calibration unit, highlighting the strong need to make instrument fiber feeds more robust to light-injection effects. Nevertheless, we demonstrate excellent stability of the wavelength calibration, with a scatter of only 17cm/s . This, however, can only be achieved when accurately modeling the non-Gaussian line-spread function, showcasing the need for advanced data analysis techniques when dealing with LFC spectra.

astro-ph.IM↗
arXiv2026

Loss Mechanisms in High-coherence Multimode Mechanical Resonators Coupled to Superconducting Circuits

Circuit quantum acoustodynamics (cQAD) devices have a wide range of applications in quantum science, all of which depend crucially on the quantum coherence of the mechanical subsystem. In this context, high-overtone bulk acoustic-wave resonators (HBARs) are particularly promising, since they have shown very high quality factors with negligible dephasing. However, the introduction of piezoelectric films, which are necessary for coupling to a superconducting circuit, can lead to additional loss channels, such as surface scattering and two-level systems (TLS). Here, we study the acoustic dissipation of HBAR resonators in cQAD systems and find that the defect density of the piezoelectric material and its interface with the bulk are limiting factors for the coherence. We measure acoustic modes with phonon lifetimes up to 400 $μ$s and lifetime-limited coherence times approaching one millisecond in the quantum regime. When coupled to a superconducting qubit, this leads to a hybrid system with a large quantum coherence cooperativity of $C_{T_2}=1.1\times10^5$. These results represent a new milestone for the performance of cQAD devices and offer concrete paths forward for further improvements.

quant-ph↗
arXiv2024

Measuring direct flexoelectricity at the nanoscale

Flexoelectricity is a property of all dielectric materials, where inhomogeneous strain induces electrical polarization. This effect becomes particularly prominent at the nanoscale where larger strain gradients can be obtained. While flexoelectric charges have been measured in mm-scale systems, direct measurements in nanoscale-thickness materials have not yet been achieved. Given that one of the most prominent applications of flexoelectricity is in nano-electro-mechanical systems (NEMS), confirming the presence and magnitude of the effect at these scales is essential. This study presents the first-ever measurements of flexoelectric-generated charges (direct effect) in nanoscale-thickness materials, using cantilevers with a 50 nm hafnium oxide layer. We confirm that the estimated flexoelectric coefficient from said measurements aligns with the values obtained from complementary experiments using the flexoelectric inverse effect. Additionally, by changing the cantilever geometry (modifying the width of the cantilevers), we demonstrate a 40% increase in the effective flexoelectric coefficient, explained by the interplay of different flexoelectric tensor components. These findings not only validate the presence of flexoelectric effects at the nanoscale but also open the possibility for full flexoelectric transduction of the motion in NEMS/MEMS devices.

physics.app-ph↗
arXiv2024

Effect of Annealing on Flexoelectricity in Hafnium Oxide (HfO2)

Flexoelectricity is universal in all dielectrics, effective at high temperatures, and a promising transduction technique for nanoelectromechanical systems (NEMS). However, as flexoelectricity is still in its early stages, many aspects require further investigation. Understanding how flexoelectricity depends on material parameters like crystallographic phase and how temperature might affect it, is important for selecting and optimizing the right material for technological applications. This work studies the influence of high-temperature annealing (and the consequent crystallization) in the flexoelectricity of hafnium oxide (HfO2), a material with significant technological relevance. We measure the flexoelectric coefficient for amorphous (not annealed) and annealed (slightly crystalline) phases of HfO2, with samples annealed in nitrogen or oxygen atmospheres. Our results indicate that the amorphous phase of HfO2 exhibits the highest flexoelectric coefficient (105 $\pm$ 10 pC/m), while annealed samples show a significant decrease, with the lowest value in nitrogen-annealed samples (26 $\pm$ 4 pC/m). Samples annealed in an oxygen atmosphere improve flexoelectric properties (54 $\pm$ 6 pC/m) compared to those annealed in nitrogen. Using cross-sectional imaging, X-ray diffraction, resonance frequency characterization, and relative permittivity measurements, we find that annealing promotes crystallization into the tetragonal phase and increases internal stress within the HfO2 layer, while most other parameters remain constant. We attribute the differences in flexoelectricity from the annealed samples to the quantity of oxygen vacancies in hafnium oxide. These oxygen vacancies in hafnium oxide seem to negatively affect the flexoelectric coefficient. This finding can be applied to optimize materials to enhance their flexoelectric properties.

cond-mat.mtrl-sci↗
arXiv2024

Flexoelectricity in Amorphous Hafnium Oxide (HfO2)

Flexoelectricity, inherent in all materials, offers a promising alternative to piezoelectricity for nanoscale actuation and sensing. However, its widespread application faces significant challenges: differentiating flexoelectric effects from those of piezoelectricity and other phenomena, verifying its universality across all material structures and thicknesses, and establishing a comprehensive database of flexoelectric coefficients across different materials. This work introduces a groundbreaking methodology that accurately isolates flexoelectricity from piezoelectric, electrostrictive and electrostatic effects, with a detection threshold extending below 1 fC/m. The robustness of this method is demonstrated through its application to amorphous hafnium oxide (HfO$_2$), successfully measuring a flexoelectric coefficient of 105 $\pm$ 10 pC/m. This measurement signifies the first measurement of flexoelectricity in hafnia, as well as in any amorphous material. Additionally, the study compiles a list of published flexoelectric coefficients, revealing an important insight. The relationship between the flexoelectric coefficient and the material's relative permittivity is better approximated by a quadratic proportionality. This challenges the traditional linear assumption proposed in Kogan's work and opens new avenues for future research in flexoelectric materials.

cond-mat.mtrl-sci↗
arXiv2024

Suspended lithium niobate acoustic resonators with buried electrodes for radiofrequency filtering

Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless communication is advancing to higher frequencies and larger bandwidths enabling higher speeds and throughput. Current micro-acoustic resonator technology, a key component in radiofrequency front end filters, is struggling to keep pace with these developments. This work presents a novel acoustic resonator architecture enabling multi-frequency, low-loss, and wideband filtering for the 5G and future 6G bands located above 3 GHz. Thanks to the exceptional performance of these resonators, filters for the 5G n77 and n79 bands are demonstrated, exhibiting fractional bandwidths of 13% and 25% respectively with low insertion loss of around 1 dB. With its unique frequency scalability and wideband capabilities, the reported architecture offers a promising option for filtering and multiplexing in future mobile devices.

physics.app-ph↗
arXiv2024

Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators

We report on the fabrication of a Hybrid SAW/BAW resonator made of a thin layer of Sc-doped AlN (AlScN) with a Sc concentration of 40 at% on a 4H-SiC substrate. A Sezawa mode, excited by a vertical electric field, exploits the d31 piezoelectric coefficient to propagate a longitudinal acoustic wave in the AlScN. The resonant frequency is determined via the pitch in the interdigitated transducer (IDT) defined by Deep Ultraviolet (DUV) lithography. The resonant mode travels in the piezoelectric layer without leaking in the substrate thanks to the mismatch in acoustic phase velocities between the piezoelectric and substrate materials. We show the impact of the piezoelectric and IDT layers' thickness on the two found modes. Importantly, we show how thin piezoelectric and electrode layers effectively suppress the Rayleigh mode. While some challenges in the deposition of AlScN remain towards a large coupling coefficient k_eff^2, We show how wave confinement in the IDT obtains a good quality factor. We also show how modifying the IDT reflectivity allows us to engineer a stopband to prevent unwanted modes from being excited between resonance and antiresonance frequencies. Finally, we validate the simulation with fabricated and measured devices and present possible improvements to this resonator architecture.

cond-mat.mtrl-sci↗
arXiv2024

More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators

Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS production for the telecommunication market. We present a process flow to fabricate suspended acoustic resonators using DUV Photolithography. This method allows for scalable production of resonators with critical dimensions of 250 nm and alignment accuracy of less than 100 nm. We show how photoresists and anti-reflective coatings integrate with the process, help with deposition quality and resolution, and how Ion Beam Etching allows for vertical sidewalls of the resonators. We measure resonance frequencies (fr) up to 7.5 GHz and electromechanical couplings up to 8%, and we investigate the uniformity of this process by analyzing the deviation of fs over the wafer surface for four main resonance modes. We show that the deviation of the S0 mode can be kept below 1%. These results indicate the suitability of this process for quick scale-up of Lamb wave resonator technology, bridging the gap from research to industry.

eess.SY↗
arXiv2024

Photostrictive actuators based on freestanding ferroelectric membranes

Complex oxides offer a wide range of functional properties, and recent advances in fabrication of freestanding membranes of these oxides are adding new mechanical degrees of freedom to this already rich functional ecosystem. Here, we demonstrate photoactuation in freestanding thin film resonators of ferroelectric Barium Titanate (BaTiO3) and paraelectric Strontium Titanate (SrTiO3). The free-standing films, transferred onto perforated supports, act as nano-drums, oscillating at their natural resonance frequency when illuminated by a frequency-modulated laser. The light-induced deflections in the ferroelectric BaTiO3 membranes are two orders of magnitude larger than in the paraelectric SrTiO3 ones. Time-resolved X-ray micro-diffraction under illumination and temperature-dependent and holographic interferometry provide combined evidence for the photostrictive strain in BaTiO3 originating from partial screening of ferroelectric polarization by photo-excited carriers, which decreases the tetragonality of the unit cell. These findings showcase the potential of photostrictive freestanding ferroelectric films as wireless actuators operated by light.

cond-mat.mtrl-sci↗
arXiv2023

Binary classification of spoken words with passive phononic metamaterials

Mitigating the energy requirements of artificial intelligence requires novel physical substrates for computation. Phononic metamaterials have a vanishingly low power dissipation and hence are a prime candidate for green, always-on computers. However, their use in machine learning applications has not been explored due to the complexity of their design process: Current phononic metamaterials are restricted to simple geometries (e.g. periodic, tapered), and hence do not possess sufficient expressivity to encode machine learning tasks. We design and fabricate a non-periodic phononic metamaterial, directly from data samples, that can distinguish between pairs of spoken words in the presence of a simple readout nonlinearity; hence demonstrating that phononic metamaterials are a viable avenue towards zero-power smart devices.

eess.SP↗
arXiv2020

Frequency fluctuations in nanomechanical silicon nitride string resonators

High quality factor ($Q$) nanomechanical resonators have received a lot of attention for sensor applications with unprecedented sensitivity. Despite the large interest, few investigations into the frequency stability of high-$Q$ resonators have been reported. Such resonators are characterized by a linewidth significantly smaller than typically employed measurement bandwidths, which is the opposite regime to what is normally considered for sensors. Here, the frequency stability of high-$Q$ silicon nitride string resonators is investigated both in open-loop and closed-loop configurations. The stability is here characterized using the Allan deviation. For open-loop tracking, it is found that the Allan deviation gets separated into two regimes, one limited by the thermomechanical noise of the resonator and the other by the detection noise of the optical transduction system. The point of transition between the two regimes is the resonator response time, which can be shown to have a linear dependence on $Q$. Laser power fluctuations from the optical readout is found to present a fundamental limit to the frequency stability. Finally, for closed-loop measurements, the response time is shown to no longer be intrinsically limited but instead given by the bandwidth of the closed-loop tracking system. Computed Allan deviations based on theory are given as well and found to agree well with the measurements. These results are of importance for the understanding of fundamental limitations of high-$Q$ resonators and their application as high performance sensors.

cond-mat.mes-hall↗
arXiv2020

Observation of a phononic quadrupole topological insulator

The modern theory of charge polarization in solids is based on a generalization of Berry's phase. Its possible quantization lies at the heart of our understanding of all systems with topological band structures that were discovered over the last decades. While based on the concept of the "charge" polarization, the same theory can be used as an elegant tool to characterize the Bloch bands of neutral bosonic systems such as photonic or phononic crystals. Recently, the theory of this quantized polarization was extended from the dipole- to higher multipole-moments. In particular, a two-dimensional quantized quadrupole insulator is predicted to have gapped yet topological one-dimensional edge-modes, which in turn stabilize zero-dimensional in-gap corner states. However, such a state of matter has not been observed experimentally. Here, we provide the first measurements of a phononic quadrupole insulator. We experimentally characterize the bulk, edge, and corner physics of a mechanical metamaterial and find the predicted gapped edge and in-gap corner states. We further corroborate our findings by comparing the mechanical properties of a topologically non-trivial system to samples in other phases predicted by the quadrupole theory. From an application point of view, these topological corner states are an important stepping stone on the way to topologically protected wave-guides in higher dimensions and thereby open a new design path for metamaterials.

cond-mat.mtrl-sci↗
arXiv2020

On the effect of linear feedback and parametric pumping on a resonators frequency stability

Resonant sensors based on Micro- and Nano-Electro Mechanical Systems (M/NEMS) are ubiquitous in many sensing applications due to their outstanding performance capabilities, which are directly proportional to the quality factor (Q) of the devices. We address here a recurrent question in the field: do dynamical techniques that modify the effective Q (namely parametric pumping and direct drive velocity feedback) affect the performance of said sensors? We develop analytical models of both cases, while remaining in the linear regime, and introduce noise in the system from two separate sources: thermomechanical and amplifier (read-out) noise. We observe that parametric pumping enhances the quality factor in the amplitude response, but worsens it in the phase response on the resonator. In the case of feedback, we find that Q is enhanced in both cases. Then, we establish a solution for the noisy problem with direct drive and parametric pumping simultaneously. We also find that, in the case when thermomechanical noise dominates, no benefit can be obtained from neither artificial Q-enhancement technique. However, in the case when amplifier noise dominates, we surprisingly observe that a significant advantage can only be achieved using parametric pumping in the squeezing region.

cond-mat.mes-hall↗
arXiv2020

Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications

Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 micro meter to 110 micro meter and suspended proof masses consisting of solid silicon cubes that are from 5 micro meter multiply 5 micro meter multiply 16.4 micro meter to 100 micro meter multiply 100 micro meter multiply 16.4 micro meter in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were greater than 90%, with more than 70% of the graphene membranes having more than 90% graphene area without visible defects. The graphene membranes with suspended proof masses were extremely robust and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

physics.app-ph↗
arXiv2019

Shape Memory Polymer Resonators as Highly Sensitive Uncooled Infrared Detectors

Uncooled InfraRed (IR) detectors have enabled the rapid growth of thermal imaging applications. These detectors are predominantly bolometers, where the heating of pixel from incoming IR radiation is read out as a resistance change. Another uncooled sensing method is to transduce the IR radiation into the frequency shift of a mechanical resonator. We present here a highly sensitive, simple to fabricate resonant IR sensor, based on thermo-responsive Shape Memory Polymers (SMPs). By exploiting the phase-change polymer as the transduction mechanism, our approach provides 2 orders of magnitude improvement of the temperature coefficient of frequency (TCF). The SMP has very good absorption in IR wavelengths, obviating the need for an absorber layer. A Noise Equivalent Temperature Difference (NETD) of 22 mK in vacuum and 112 mK in air are obtained using f/2 optics. Such high performance in air eliminates the need for vacuum packaging, paving a path towards flexible IR sensors.

physics.ins-det↗
arXiv2016

Frequency fluctuations in silicon nanoresonators

Frequency stability is key to performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally-induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequency response, these fluctuations have recently attracted considerable theoretical interest. However, their existence is very difficult to demonstrate experimentally. Here, through a literature review, we show that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise. We studied a monocrystalline silicon nanoresonator at room temperature, and found a similar discrepancy. We propose a new method to show this was due to the presence of frequency fluctuations, of unexpected level. The fluctuations were not due to the instrumentation system, or to any other of the known sources investigated. These results challenge our current understanding of frequency fluctuations and call for a change in practices.

cond-mat.mes-hall↗