arXiv subjects

Salma Soliman

Publications and source records attributed to Salma Soliman.

4 recordsLinked to original sources

arXiv2026

Engineering Wake-Up-Free Ferroelectric Capacitors with Enhanced High-Temperature Reliability

We systematically explore the design space of ferroelectric hafnium-zirconium oxide (H0.5Z0.5O or HZO) heterostructures for reliable high temperature operation. HZO films are deposited using thermal and plasma-enhanced atomic layer deposition (Th-ALD and PE-ALD) on tungsten (W) and titanium nitride (TiN) bottom electrodes (BE), while maintaining identical top electrodes. We demonstrate that PE-ALD HZO capacitors integrated with W BE exhibit wake-up-free switching up to 125C, along with significantly improved endurance compared to Th-ALD HZO/W devices across a wide temperature range (85-125C). By decoupling the contributions of the plasma-deposited HZO film and the oxidized bottom interface inherently formed during PE-ALD, we identify the oxidized W interfacial layer (WOx) as the primary factor governing endurance enhancement and wake-up suppression at elevated temperatures, while the PE-ALD HZO film provides secondary benefits in reducing wake-up. In contrast, PE-ALD HZO capacitors fabricated on TiN BE show no substantial improvement in wake-up behavior or endurance relative to Th-ALD HZO/TiN devices, despite the formation of an unintentional TiOxNy interfacial layer, and instead exhibit degraded polarization. This difference arises from the significantly weaker endurance enhancement and no wake-up suppression provided by oxidized TiN compared to oxidized W under comparable oxidation conditions. Overall, PE-ALD HZO films enable superior ferroelectric performance at elevated temperatures only when deposited on W BE, while Th-ALD HZO films remain a viable option for high temperature operation on TiN BE. These findings clarify the interplay between deposition technique, electrode chemistry, and interfacial oxidation, and provide design guidelines for integrating ferroelectric memories into monolithic 3D systems under stringent thermal constraints.

cond-mat.mtrl-sci↗

arXiv2026

ALD Oxidant as A Tuning Knob for Memory Window Expansion in Ferroelectric FETs for Vertical NAND Applications

Dielectric inserts are widely used to expand the memory window (MW) in ferroelectric FETs (FeFETs) for vertical NAND applications, with prior efforts focused primarily on material selection and stack positioning. Here, we demonstrate that the ALD oxidant used for the Al2O3 interlayer serves as a process-level tuning knob for MW engineering. H2O-grown Al2O3 yields a significantly larger MW (7-8 V) compared to O3 (4 V) for both gate-injection (12/3) and tunnel dielectric (8/3/8) configurations. While the tunnel dielectric (8/3/8) stack maintains robust retention up to 1e4s at 125C despite the larger MW, the gate-injection (12/3) configuration exhibits pronounced retention degradation for the H2O case. The enhanced MW is attributed to higher interlayer leakage associated with H2O-based ALD. These results establish oxidant choice as a key process parameter for co-optimizing MW and retention in ferroelectric NAND technologies.

cond-mat.mtrl-sci↗

arXiv2026

ALD-Derived WO3-x Leads to Nearly Wake-Up-Free Ferroelectric Hf0.5Zr0.5O2 at Elevated Temperatures

Breaking the memory wall in advanced computing architectures will require complex 3D integration of emerging memory materials such as ferroelectrics-either within the back-end-of-line (BEOL) of CMOS front-end processes or through advanced 3D packaging technologies. Achieving this integration demands that memory materials exhibit high thermal resilience, with the capability to operate reliably at elevated temperatures such as 125C, due to the substantial heat generated by front-end transistors. However, silicon-compatible HfO2-based ferroelectrics tend to exhibit antiferroelectric-like behavior in this temperature range, accompanied by a more pronounced wake-up effect, posing significant challenges to their thermal reliability. Here, we report that by introducing a thin tungsten oxide (WO3-x) layer-known as an oxygen reservoir-and carefully tuning its oxygen content, ultra-thin Hf0.5Zr0.5O2 (5 nm) films can be made robust against the ferroelectric-to-antiferroelectric transition at elevated temperatures. This approach not only minimizes polarization loss in the pristine state but also effectively suppresses the wake-up effect, reducing the required wake-up cycles from 105 to only 10 at 125C- a qualifying temperature for back-end memory integrated with front-end logic, as defined by the JEDEC standard. First-principles density functional theory calculations reveal that WO3 enhances the stability of the ferroelectric orthorhombic phase at elevated temperatures by increasing the tetragonal-to-orthorhombic phase energy gap, and promoting favorable phonon mode evolution, thereby supporting o-phase formation under both thermodynamic and kinetic constraints.

cond-mat.mtrl-sci↗

arXiv2025

A Dual-Memory Ferroelectric Transistor Emulating Synaptic Metaplasticity for High-Speed Reservoir Computing

The exponential growth of edge artificial intelligence demands material-focused solutions to overcome energy consumption and latency limitations when processing real-time temporal data. Physical reservoir computing (PRC) offers an energy-efficient paradigm but faces challenges due to limited device scalability and reconfigurability. Additionally, reservoir and readout layers require memory of different timescales, short-term and long-term respectively - a material challenge hindering CMOS-compatible implementations. This work demonstrates a CMOS-compatible ferroelectric transistor using hafnium-zirconium-oxide (HZO) and silicon, enabling dual-memory operation. This system exhibits non-volatile long-term memory (LTM) from ferroelectric HZO polarization and volatile short-term memory (STM) from engineered non-quasi-static (NQS) channel-charge relaxation driven by gate-source/drain overlap capacitance. Ferroelectric polarization acts as non-volatile programming of volatile dynamics: by modulating threshold voltage, the ferroelectric state deterministically switches the NQS time constant and computational behavior between paired-pulse facilitation (PPF) and depression (PPD). This establishes a generalizable material-design principle applicable to diverse ferroelectric-semiconductor heterostructures, extending beyond silicon to oxide semiconductors and heterogeneously-integrated systems. The device solves second-order nonlinear tasks with 3.69 x 10^-3 normalized error using only 16 reservoir states - ~5x reduction - achieving 20 us response time (~1000x faster) and 1.5 x 10^-7 J energy consumption, providing an immediately manufacturable pathway for neuromorphic hardware and energy-efficient edge intelligence.

cond-mat.other↗