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Suman Datta

Publications and source records attributed to Suman Datta.

At least 19 recordsLinked to original sources

A Process-Aware Hybrid Si/IGO Monolithic-3D 6T SRAM with BEOL Pass-Gates for the 2nm Node

We propose a monolithic-3D (M3D) 6T SRAM at the 2nm node, integrating BEOL IGO pass-gates (PGs) with an all-silicon nanosheet latch, buried power rails (BPRs), and Ru interconnects. TCAD calibrated to a state-of-the-art double-gate IGO transistor with a tri-layer HfO$_2$/ZrO$_2$/HfO$_2$ (HZH) gate stack is combined with virtual fabrication and 3D parasitic extraction to realize the first process-aware layout of this topology. A novel neighbor-cell shared source/drain (S/D) bitline (BL) design enlarges the IGO contact area to mitigate contact resistance and restore PG drive without area penalty. The resulting cell achieves a 25\% footprint reduction vs the high-performance (HP) 122 Si baseline while maintaining robust static noise margin (SNM) over a wide supply voltage range. At the 128$\times$256 subarray-level, it reduces write delay by 42.2\% and EDP by 9.7\% compared to the high-density (HD) 111 Si baseline, owing to reduced cell parasitics and wordline (WL) loading from the smaller footprint.

cs.AR

Thermal Processing Limits in Oxide-Channel Ferroelectric Field Effect Transistors

In this work, we report a systematic study of the impact of high-temperature post-capping thermal annealing on the memory characteristics of Oxide-semiconductor channel ferroelectric field-effect transistors (OS-FeFETs). Using an identical engineered ferroelectric gate stack 8nm Hf0.5Zr0.5O2 (HZO) / 3 nm Al2O3 / 8 nm HZO (8/3/8) and a hybrid capping layer (3 nm HfO2 + 3 nm Al2O3), 10 percent Ga doped InO (IGO) channel and 4 percent W doped InO (IWO) channel FeFETs remain functional after annealing at temperatures up to 650 C for durations of up to 30 min and 10 min, respectively; further annealing results in irreversible loss of conduction and device failure. Detailed electrical analysis reveals that the MW enhancement originates from a preferential positive shift in the erased-state threshold voltage, while the programmed-state threshold voltage remains comparatively stable. Grazing-incidence X-ray diffraction measurements further indicate structural evolution in the IWO and IGO oxide channels with increasing annealing temperature, supporting the observed electrical trends.

cond-mat.mtrl-sci

ThermoPix: A High-Spatial-Resolution ElectronicPhotonic Temperature Sensor Array With Microsecond Row Readout

This paper presents ThermoPix, a CMOS-compatible electronic-photonic architecture for high-spatial-resolution temperature sensing. The proposed system converts temperature-induced wavelength shifts in a photonic interferometric sensor into timing information that can be processed by CMOS circuitry. We use a valley photonic crystal Mach-Zehnder interferometer (VPCMZI) as the sensing element, whose temperature-dependent spectral response is detected using an integrated waveguide photodetector and translated into a time-varying photocurrent. A CMOS readout circuit employing a phase-transition-material device performs threshold detection and generates a timing signal corresponding to the temperature-dependent crossing event. Circuit-level simulations demonstrate a temperature sensitivity of 3.15 ns/K, a row readout time of 2 us, and a sensing power-delay product (PDP) of 0.152 fJ. The required optical power per photonic cell is 150 nW, enabling energy-efficient array operation without requiring cooling or special environmental arrangements. We also present alternative photonic layer architectures for optical power distribution across the array. In one approach, we use different tap ratios along the row, while the other uses identical tap ratios with bidirectional excitation. The resulting average photonic cell pitches are 23.26 um and 38.52 um, respectively. The proposed ThermoPix architecture therefore provides a scalable platform for integrated temperature sensing arrays that combine photonic sensing elements with CMOS-compatible timing-based readout.

cs.ET

System-Technology Co-Optimization of Bitline Routing and Bonding Pathways in Monolithic 3D DRAM Architectures

3D DRAM has emerged as a promising approach for continued density scaling, but its viability is limited by routing and hybrid bonding constraints to periphery, which may degrade sensing margin, latency, and array efficiency. With device characteristics and array parasitics extracted from TCAD, SPICE simulations are performed with peri logic in a CMOS-Bonded-Array (CBA). The analysis shows that the bitline strap architecture with amorphous oxide semiconductor (AOS) selectors is essential to manage routing congestion and parasitics. The optimized design achieves a bit density of 2.6 Gb/mm^2 (137 layers with Si access transistors or 87 layers with AOS), representing ~6x density scaling over D1b 2D DRAM. The design further demonstrates a nominal row cycle time (tRC) of 10.5 ns, compared to 21.3 ns in D1b, and a 60% reduction in read/write energy.

cs.AR

ALD Oxidant as A Tuning Knob for Memory Window Expansion in Ferroelectric FETs for Vertical NAND Applications

Dielectric inserts are widely used to expand the memory window (MW) in ferroelectric FETs (FeFETs) for vertical NAND applications, with prior efforts focused primarily on material selection and stack positioning. Here, we demonstrate that the ALD oxidant used for the Al2O3 interlayer serves as a process-level tuning knob for MW engineering. H2O-grown Al2O3 yields a significantly larger MW (7-8 V) compared to O3 (4 V) for both gate-injection (12/3) and tunnel dielectric (8/3/8) configurations. While the tunnel dielectric (8/3/8) stack maintains robust retention up to 1e4s at 125C despite the larger MW, the gate-injection (12/3) configuration exhibits pronounced retention degradation for the H2O case. The enhanced MW is attributed to higher interlayer leakage associated with H2O-based ALD. These results establish oxidant choice as a key process parameter for co-optimizing MW and retention in ferroelectric NAND technologies.

cond-mat.mtrl-sci

Physics-informed AI Accelerated Retention Analysis of Ferroelectric Vertical NAND: From Day-Scale TCAD to Second-Scale Surrogate Model

Ferroelectric field-effect transistors (FeFET)-based vertical NAND (Fe-VNAND) has emerged as a promising candidate to overcome z-scaling limitations with lower programming voltages. However, the data retention of 3D Fe-VNAND is hindered by the complex interaction between charge detrapping and ferroelectric depolarization. Developing optimized device designs requires exploring an extensive parameter space, but the high computational cost of conventional Technology Computer-Aided Design (TCAD) tools makes such wide-scale optimization impractical. To overcome these simulation barriers, we present a Physics-Informed Neural Operator (PINO)-based AI surrogate model designed for high-efficiency prediction of threshold voltage (Vth) shifts and retention behavior. By embedding fundamental physical principles into the learning architecture, our PINO framework achieves a speedup exceeding 10000x compared to TCAD while maintaining physical accuracy. The resulting surrogate provides a physics-consistent data engine for compact model parameter extraction and look-up-table (LUT) generation, directly supporting reliability-aware SPICE simulation of Fe-VNAND. This study demonstrates the model's effectiveness on a single FeFET configuration, serving as a pathway toward modeling the retention loss mechanisms.

cs.LG

ALD-Derived WO3-x Leads to Nearly Wake-Up-Free Ferroelectric Hf0.5Zr0.5O2 at Elevated Temperatures

Breaking the memory wall in advanced computing architectures will require complex 3D integration of emerging memory materials such as ferroelectrics-either within the back-end-of-line (BEOL) of CMOS front-end processes or through advanced 3D packaging technologies. Achieving this integration demands that memory materials exhibit high thermal resilience, with the capability to operate reliably at elevated temperatures such as 125C, due to the substantial heat generated by front-end transistors. However, silicon-compatible HfO2-based ferroelectrics tend to exhibit antiferroelectric-like behavior in this temperature range, accompanied by a more pronounced wake-up effect, posing significant challenges to their thermal reliability. Here, we report that by introducing a thin tungsten oxide (WO3-x) layer-known as an oxygen reservoir-and carefully tuning its oxygen content, ultra-thin Hf0.5Zr0.5O2 (5 nm) films can be made robust against the ferroelectric-to-antiferroelectric transition at elevated temperatures. This approach not only minimizes polarization loss in the pristine state but also effectively suppresses the wake-up effect, reducing the required wake-up cycles from 105 to only 10 at 125C- a qualifying temperature for back-end memory integrated with front-end logic, as defined by the JEDEC standard. First-principles density functional theory calculations reveal that WO3 enhances the stability of the ferroelectric orthorhombic phase at elevated temperatures by increasing the tetragonal-to-orthorhombic phase energy gap, and promoting favorable phonon mode evolution, thereby supporting o-phase formation under both thermodynamic and kinetic constraints.

cond-mat.mtrl-sci

The First Switch Effect in Ferroelectric Field-Effect Transistors

In this work, a ferroelectric field-effect transistor (FEFET) is systematically characterized and compared with an equivalent standard MOSFET with an equivalent oxide thickness. We show that these two devices, with a silicon channel, exhibit similar pristine state transfer characteristics but starkly different endurance characteristics. In contrast to the MOSFET, the FEFET shows a significant increase in sub-threshold swing in the first write pulse. Based on this, we reveal that this first write pulse (cycle 1) generates more than half of the total traps generated during the fatigue cycling in FEFETs. We call this the 'First Switch Effect'. Further, by polarizing a pristine FEFET step by step, we demonstrate a direct correlation between the switched polarization and interface trap density during the first switch. Through charge pumping measurements, we also observe that continued cycling generates traps more towards the bulk of the stack, away from the Si/SiO2 interface in FEFETs. We establish that: (1) the first switch effect leads to approximately 50% of the total trap density (Nit) near the Si/SiO2 interface until memory window closure; and (2) further bipolar cycling leads to trap generation both at and away from Si/SiO2 interface in FEFETs.

cond-mat.mtrl-sci

Pulse-Mode Operation and Reliability of BEOL-Compatible Ferroelectric Non-Volatile Capacitive Memories with Amorphous Oxide Semiconductor Channels

Non-volatile capacitive memories (nvCAPs) exhibiting AC small-signal capacitance on/off ratio (Con/Coff) with non-destructive read have emerged as a promising device for next-generation memory paradigms. Recently, BEOL-compatible ferroelectric nvCAPs with an amorphous oxide semiconductor channel have been reported, suggesting the possibility of monolithic 3D integration of nvCAPs on top of CMOS. So far, the characterization studies on oxide-channel ferroelectric nvCAPs have been done using dual DC sweep C-V measurements which are typically performed over a time scale of a few seconds. However, non-volatile memory arrays typically require nvCAPs to operate under pulse-mode. It is thus crucial to advance understanding of the behavior of oxide-channel ferroelectric nvCAPs under pulse-mode operation, governed by the unique interplay between ferroelectric layer and oxide channel physics. In this study, we provide a systematic study of the pulse-mode operation of ferroelectric nvCAPs with an amorphous oxide semiconductor channel, including its pulse-based write characteristics and reliability characteristics. We examine overlap area, wake-up and pulse-width dependent Con and Coff writing characteristics under pulse-mode. Further, we suggest the importance of optimizing ferroelectric depolarization for Con retention, while reducing read-after-delay for Coff retention under pulse-mode. Lastly, non-destructive read operation for >10^9 read stress cycles at |Vread|=1V is demonstrated.

cond-mat.mtrl-sci

Revealing Phonon Bridge Effect for Amorphous vs Crystalline Metal-Silicide Layers at Si/Ti Interfaces by a Machine Learning Potential

Metal-semiconductor interfaces play a central role in micro and nano-electronic devices as heat dissipation or temperature drop across these interfaces can significantly affect device performance. Prediction of accurate thermal boundary resistance (TBR) across these interfaces, considering realistic structures and their correlation with underlying thermal transport, remains challenging. In this work we develop a unified Neuroevolution Potential (NEP) for the Si-Ti system that accurately reproduces energies, forces, and phonon properties of bulk Si, Ti, and TiSi2 and extends naturally to interfacial environments to analyze interfacial transport. An important development over current machine-learned interatomic potentials is the capability to model complex structures at metal-semiconductor interfaces, as the NEP enables large scale non-equilibrium molecular dynamics simulations of epitaxial Si/Ti interfaces to elucidate the effect of amorphous or crystalline silicide interfacial layers. Simulated TBRs show excellent agreement with our time-domain thermoreflectance (TDTR) measurements. Spectral analyses reveal that amorphous TiSi2 interfacial layer helps in efficient interfacial transport when the thickness is less than 1.5 nm compared to the crystalline TiSi2 layer, but this trend reverses when the interfacial layer thickness increases beyond 1.5 nm. Comparison of TBRs at Si/TiSi2 interface for different crystalline phases of TiSi2 establishes that C54 phase has reduced TBR compared to C49 phase, which is correlated with the difference in their phonon density of states (PDOS) overlap with Si. These results provide atomistic insight into the role of crystalline versus amorphous silicides in interfacial heat transport and demonstrate a transferable machine-learned potential for studying heat dissipation in advanced semiconductor devices.

cond-mat.mtrl-sci

Row Hammer Effect and Floating Body Effect of Monolithic 3D Stackable 1T1C DRAM

Monolithic 3D stackable 1T1C DRAM technology is on the rise, with initial prototypes reported by the industry. This work presents a comprehensive reliability study focusing on the intricate interplay between the row hammer effect and the floating body effect. First, using a TCAD model of a 3D DRAM mini-array, we categorize different cases of adjacent cells and show that the notorious row hammer effect induced by charge migration is significantly mitigated compared to 2D DRAM. However, we found that when incorporating an impact ionization model to account for the floating body characteristics of the silicon access transistor, the capacitive coupling between vertically stacked cells is severely exacerbated. Second, we conduct an in-depth investigation into the floating body effect itself. We systematically examine the dependence of this effect on key device parameters, including body thickness, doping concentration, and gate work function.

physics.app-ph

Cryogenic Characterization of Ferroelectric Non-volatile Capacitors

Ferroelectric-based capacitive crossbar arrays have been proposed for energy-efficient in-memory computing in the charge domain. They combat the challenges like sneak paths and high static power faced by resistive crossbar arrays but are susceptible to thermal noise limiting the effective number of bits (ENOB) for the weighted sum. A direct way to reduce this thermal noise is by lowering the temperature as thermal noise is proportional to temperature. In this work, we first characterize the non-volatile capacitors (nvCaps) on a foundry 28 nm platform at cryogenic temperatures to evaluate the memory window, ON state retention as a function of temperature down to 77K, and then use the calibrated device models to simulate the capacitive crossbar arrays in SPICE at lower temperatures to demonstrate higher ENOB (~5 bits) for 128x128 multiple-and-accumulate (MAC) operations.

cs.ET

Direct imaging of asymmetric interfaces and electrostatic potentials inside a hafnia-zirconia ferroelectric nanocapacitor

In hafnia-based thin-film ferroelectric devices, chemical phenomena during growth and processing such as oxygen vacancy formation and interfacial reactions appear to strongly affect device performance. However, the nanoscale structure, chemistry, and electrical potentials in these devices are not fully known, making it difficult to understand their influence on device properties. Here, we directly image the composition and electrostatic potential with nanometer resolution in the cross section of a nanocrystalline W / Hf$_{0.5}$Zr$_{0.5}$O$_{2-δ}$ (HZO) / W ferroelectric capacitor using multimodal electron microscopy. This reveals a 1.4 nm wide tungsten sub-oxide interfacial layer formed at the bottom interface during fabrication which introduces a potential dip and leads to asymmetric switching fields. Additionally, the measured inner potential in HZO is consistent with the presence of about 20% oxygen vacancies and a negative built-in potential in HZO. These chemical and electrostatic details are important to characterize and tune to achieve high performance ferroelectric devices.

cond-mat.mtrl-sci

Towards Reverse-Engineering the Brain: Brain-Derived Neuromorphic Computing Approach with Photonic, Electronic, and Ionic Dynamicity in 3D integrated circuits

The human brain has immense learning capabilities at extreme energy efficiencies and scale that no artificial system has been able to match. For decades, reverse engineering the brain has been one of the top priorities of science and technology research. Despite numerous efforts, conventional electronics-based methods have failed to match the scalability, energy efficiency, and self-supervised learning capabilities of the human brain. On the other hand, very recent progress in the development of new generations of photonic and electronic memristive materials, device technologies, and 3D electronic-photonic integrated circuits (3D EPIC ) promise to realize new brain-derived neuromorphic systems with comparable connectivity, density, energy-efficiency, and scalability. When combined with bio-realistic learning algorithms and architectures, it may be possible to realize an 'artificial brain' prototype with general self-learning capabilities. This paper argues the possibility of reverse-engineering the brain through architecting a prototype of a brain-derived neuromorphic computing system consisting of artificial electronic, ionic, photonic materials, devices, and circuits with dynamicity resembling the bio-plausible molecular, neuro/synaptic, neuro-circuit, and multi-structural hierarchical macro-circuits of the brain based on well-tested computational models. We further argue the importance of bio-plausible local learning algorithms applicable to the neuromorphic computing system that capture the flexible and adaptive unsupervised and self-supervised learning mechanisms central to human intelligence. Most importantly, we emphasize that the unique capabilities in brain-derived neuromorphic computing prototype systems will enable us to understand links between specific neuronal and network-level properties with system-level functioning and behavior.

cs.ET

Paving the Way for Pass Disturb Free Vertical NAND Storage via A Dedicated and String-Compatible Pass Gate

In this work, we propose a dual-port cell design to address the pass disturb in vertical NAND storage, which can pass signals through a dedicated and string-compatible pass gate. We demonstrate that: i) the pass disturb-free feature originates from weakening of the depolarization field by the pass bias at the high-${V}_{TH}$ (HVT) state and the screening of the applied field by channel at the low-${V}_{TH}$ (LVT) state; ii) combined simulations and experimental demonstrations of dual-port design verify the disturb-free operation in a NAND string, overcoming a key challenge in single-port designs; iii) the proposed design can be incorporated in a highly scaled vertical NAND FeFET string and the pass gate can be incorporated into the existing 3D NAND with the negligible overhead of the pass gate interconnection through a global bottom pass gate contact in the substrate.

cs.ET

Reimagining Sense Amplifiers: Harnessing Phase Transition Materials for Current and Voltage Sensing

Energy-efficient sense amplifier (SA) circuits are essential for reliable detection of stored memory states in emerging memory systems. In this work, we present four novel sense amplifier (SA) topologies based on phase transition material (PTM) tailored for non-volatile memory applications. We utilize the abrupt switching and volatile hysteretic characteristics of PTMs which enables efficient and fast sensing operation in our proposed SA topologies. We provide comprehensive details of their functionality and assess how process variations impact their performance metrics. Our proposed sense amplifier topologies manifest notable performance enhancement. We achieve a ~67% reduction in sensing delay and a ~80% decrease in sensing power for current sensing. For voltage sensing, we achieve a ~75% reduction in sensing delay and a ~33% decrease in sensing power. Moreover, the proposed SA topologies exhibit improved variation robustness compared to conventional SAs. We also scrutinize the dependence of transistor mirroring window and PTM transition voltages on several device parameters to determine the optimum operating conditions and stance of tunability for each of the proposed SA topologies.

cs.ET

2022 Roadmap on Neuromorphic Computing and Engineering

Modern computation based on the von Neumann architecture is today a mature cutting-edge science. In the Von Neumann architecture, processing and memory units are implemented as separate blocks interchanging data intensively and continuously. This data transfer is responsible for a large part of the power consumption. The next generation computer technology is expected to solve problems at the exascale with 1018 calculations each second. Even though these future computers will be incredibly powerful, if they are based on von Neumann type architectures, they will consume between 20 and 30 megawatts of power and will not have intrinsic physically built-in capabilities to learn or deal with complex data as our brain does. These needs can be addressed by neuromorphic computing systems which are inspired by the biological concepts of the human brain. This new generation of computers has the potential to be used for the storage and processing of large amounts of digital information with much lower power consumption than conventional processors. Among their potential future applications, an important niche is moving the control from data centers to edge devices. The aim of this Roadmap is to present a snapshot of the present state of neuromorphic technology and provide an opinion on the challenges and opportunities that the future holds in the major areas of neuromorphic technology, namely materials, devices, neuromorphic circuits, neuromorphic algorithms, applications, and ethics. The Roadmap is a collection of perspectives where leading researchers in the neuromorphic community provide their own view about the current state and the future challenges. We hope that this Roadmap will be a useful resource to readers outside this field, for those who are just entering the field, and for those who are well established in the neuromorphic community. https://doi.org/10.1088/2634-4386/ac4a83

cs.ET

Logic Compatible High-Performance Ferroelectric Transistor Memory

Silicon ferroelectric field-effect transistors (FeFETs) with low-k interfacial layer (IL) between ferroelectric gate stack and silicon channel suffers from high write voltage, limited write endurance and large read-after-write latency due to early IL breakdown and charge trapping and detrapping at the interface. We demonstrate low voltage, high speed memory operation with high write endurance using an IL-free back-end-of-line (BEOL) compatible FeFET. We fabricate IL-free FeFETs with 28nm channel length and 126nm width under a thermal budget <400C by integrating 5nm thick Hf0.5Zr0.5O2 gate stack with amorphous Indium Tungsten Oxide (IWO) semiconductor channel. We report 1.2V memory window and read current window of 10^5 for program and erase, write latency of 20ns with +/-2V write pulses, read-after-write latency <200ns, write endurance cycles exceeding 5x10^10 and 2-bit/cell programming capability. Array-level analysis establishes IL-free BEOL FeFET as a promising candidate for logic-compatible high-performance on-chip buffer memory and multi-bit weight cell for compute-in-memory accelerators.

cond-mat.mes-hall