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Tobias J. Kippenberg

Publications and source records attributed to Tobias J. Kippenberg.

At least 145 records · Page 8Linked to original sources

PORT: A piezoelectric optical resonance tuner

This abstract presents an aluminum nitride (AlN) piezoelectric actuator for tuning optical resonance modes of silicon nitride photonic resonators. The AlN actuator is fabricated on top of a thick silicon dioxide cladding that encapsulates the nitride resonator and waveguide. The PORT is defined by undercutting the cladding layer with a lateral silicon etch. It tunes the optical wavelength by 20pm on applying 60 V to the top electrode with a 0.5nA current draw. The thick oxide cladding preserves the resonator's loaded quality factor Q optical of 64,000 across the entire tuning range. The first bending mode is at 1.1MHz enabling a tuning speed of <1 μs.

physics.app-ph↗

Clamp-tapering increases the quality factor of stressed nanobeams

Stressed nanomechanical resonators are known to have exceptionally high quality factors ($Q$) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator $Q$ is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the $Q$ of nanobeams made of high-stress $\mathrm{Si_3N_4}$. We find that tapering the beam near the clamp - and locally increasing the stress - leads to increased $Q$ of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to decreased $Q$ despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed "soft-clamping" technique. Tapered-clamping enhances the $Q$ of the fundamental mode and can be implemented without increasing the device size.

physics.app-ph↗

Thermo-refractive noise in silicon nitride microresonators

Thermodynamic noise places a fundamental limit on the frequency stability of dielectric optical resonators. Here, we present the characterization of thermo-refractive noise in photonic-chip-based silicon nitride microresonators and show that thermo-refractive noise is the dominant thermal noise source in the platform. We employed balanced homodyne detection to measure the thermo-refractive noise spectrum of microresonators of different diameters. The measurements are in good agreement with theoretical models and finite element method simulations. Our characterization sets quantitative bounds on the scaling and absolute magnitude of thermal noise in photonic chip-based microresonators. An improved understanding of thermo-refractive noise can prove valuable in the design considerations and performance limitations of future photonic integrated devices.

physics.optics↗

Spectral purification of microwave signals with disciplined dissipative Kerr solitons

Continuous-wave-driven Kerr nonlinear microresonators give rise to self-organization in terms of dissipative Kerr solitons, which constitute optical frequency combs that can be used to generate low-noise microwave signals. Here, by applying either amplitude or phase modulation to the driving laser we create an intracavity potential trap, to discipline the repetition rate of the solitons. We demonstrate that this effect gives rise to a novel spectral purification mechanism of the external microwave signal frequency, leading to reduced phase noise of the output signal. We experimentally observe that the microwave signal generated from disciplined solitons follows the external drive at long time scales, but exhibits an unexpected suppression of the fast timing jitter. Counter-intuitively, this filtering takes place for frequencies that are substantially lower than the cavity decay rate. As a result, while the long-time-scale stability of the Kerr frequency comb repetition rate is improved by more than 4 orders of magnitude as a result of locking to the external microwave signal, the soliton stream shows a reduction of the phase noise by 30 dB at offset frequencies above 10 kHz.

physics.app-ph↗

Detuning-dependent Properties and Dispersion-induced Instabilities of Temporal Dissipative Kerr Solitons in Optical Microresonators

Temporal-dissipative Kerr solitons are self-localized light pulses sustained in driven nonlinear optical resonators. Their realization in microresonators has enabled compact sources of coherent optical frequency combs as well as the study of dissipative solitons. A key parameter of their dynamics is the effective-detuning of the pump laser to the thermally- and Kerr-shifted cavity resonance. Together with the free spectral range and dispersion, it governs the soliton-pulse duration, as predicted by an approximate analytical solution of the Lugiato-Lefever equation. Yet, a precise experimental verification of this relation was lacking so far. Here, by measuring and controlling the effective-detuning, we establish a new way of stabilizing solitons in microresonators and demonstrate that the measured relation linking soliton width and detuning deviates by less than 1 % from the approximate expression, validating its excellent predictive power. Furthermore, a detuning-dependent enhancement of specific comb lines is revealed, due to linear couplings between mode-families. They cause deviations from the predicted comb power evolution, and induce a detuning-dependent soliton recoil that modifies the pulse repetition-rate, explaining its unexpected dependence on laser-detuning. Finally, we observe that detuning-dependent mode-crossings can destabilize the soliton, leading to an unpredicted soliton breathing regime (oscillations of the pulse) that occurs in a normally-stable regime. Our results test the approximate analytical solutions with an unprecedented degree of accuracy and provide new insights into dissipative-soliton dynamics.

physics.optics↗

Electrically pumped photonic integrated soliton microcomb

Optical frequency combs have revolutionized frequency metrology and timekeeping, and can be used in a wide range of optical technologies. Advances are under way that allow dramatic miniaturization of optical frequency combs using Kerr nonlinear optical microresonators, where broadband and coherent optical frequency combs can be generated from a continuous wave laser. Such `microcombs', provide a broad bandwidth with low power consumption, unprecedented form factor, wafer scale fabrication compatibility. For future high volume applications, integration and electrical pumping of soliton microcombs is essential. To date, however, microcombs still rely on optical pumping by bulk external laser modules that provide the required coherence, frequency agility and power levels for soliton formation. Electrically-driven, chip-integrated microcombs are inhibited by the high threshold power for soliton formation, typically exceeding the power of integrated silicon based lasers, and the required frequency agility for soliton initiation. Recent advances in high-Q Si3N4 microresonators suggest that electrically driven soliton microcombs are possible. Here we demonstrate an electrically-driven, chip-integrated soliton microcomb by coupling an indium phosphide (III-V) multiple-longitudinal-mode laser diode chip to a high-Q Si3N4 photonic integrated microresonator. We observe that self-injection locking of the laser diode to the microresonator, which is accompanied by a x1000 fold narrowing of the laser linewidth, can simultaneously initiate the formation of dissipative Kerr solitons. By tuning the current, we observe a transition from modulation instability, breather solitons to single soliton states. The system requires less than 1 Watt of electrical power, operates at electronically-detectable sub-100 GHz mode spacing and can fit in a volume of ca. 1cm3.

physics.optics↗

Ultralow-power chip-based soliton microcombs for photonic integration

The generation of dissipative Kerr solitons in optical microresonators has provided a route to compact frequency combs of high repetition rate, which have already been employed for optical frequency synthesizers, ultrafast ranging, coherent telecommunication and dual-comb spectroscopy. Silicon nitride (Si$_3$N$_4$) microresonators are promising for photonic integrated soliton microcombs. Yet to date, soliton formation in Si$_3$N$_4$ microresonators at electronically detectable repetition rates, typically less than 100 GHz, is hindered by the requirement of external power amplifiers, due to the low quality ($Q$) factors, as well as by thermal effects which necessitate the use of frequency agile lasers to access the soliton state. These requirements complicate future photonic integration, heterogeneous or hybrid, of soliton microcomb devices based on Si$_3$N$_4$ microresonators with other active or passive components. Here, using the photonic Damascene reflow process, we demonstrate ultralow-power single soliton formation in high-Q ($Q_0>15\times10^6$) Si$_3$N$_4$ microresonators with 9.8 mW input power (6.2 mW in the waveguide) for devices of electronically detectable, 99 GHz repetition rate. We show that solitons can be accessed via simple, slow laser piezo tuning, in many resonances in the same sample. These power levels are compatible with current silicon-photonics-based lasers for full photonic integration of soliton microcombs, at repetition rates suitable for applications such as ultrafast ranging and coherent communication. Our results show the technological readiness of Si$_3$N$_4$ optical waveguides for future all-on-chip soliton microcomb devices.

physics.optics↗

Spatial multiplexing of soliton microcombs

Dual-comb interferometry utilizes two optical frequency combs to map the optical field's spectrum to a radio-frequency signal without using moving parts, allowing improved speed and accuracy. However, the method is compounded by the complexity and demanding stability associated with operating multiple laser frequency combs. To overcome these challenges, we demonstrate simultaneous generation of multiple frequency combs from a single optical microresonator and a single continuous-wave laser. Similar to space-division multiplexing, we generate several dissipative Kerr soliton states - circulating solitonic pulses driven by a continuous-wave laser - in different spatial (or polarization) modes of a $\mathrm{MgF_2}$ microresonator. Up to three distinct combs are produced simultaneously, featuring excellent mutual coherence and substantial repetition rate differences, useful for fast acquisition and efficient rejection of soliton intermodulation products. Dual-comb spectroscopy with amplitude and phase retrieval, as well as optical sampling of a breathing soliton, is realised with the free-running system. Compatibility with photonic-integrated resonators could enable the deployment of dual- and triple-comb-based methods to applications where they remained impractical with current technology.

physics.optics↗

Optical Backaction-Evading Measurement of a Mechanical Oscillator

Quantum mechanics imposes a limit on the precision of a continuous position measurement of a harmonic oscillator, as a result of quantum backaction arising from quantum fluctuations in the measurement field. A variety of techniques to surpass this standard quantum limit have been proposed, such as variational measurements, stroboscopic quantum non-demolition and two tone backaction-evading (BAE) measurements. The latter proceed by monitoring only one of the two non-commuting quadratures of the motion. This technique, originally proposed in the context of gravitational wave detection, has not been implemented using optical interferometers to date. Here we demonstrate continuous two-tone backaction-evading measurement in the optical domain of a localized GHz frequency mechanical mode of a photonic crystal nanobeam cryogenically and optomechanically cooled in a $^3$He buffer gas cryostat close to the ground state. Employing quantum-limited optical heterodyne detection, we explicitly show the transition from conventional to backaction-evading measurement. We observe up to 0.67 dB (14%) reduction of total measurement noise, thereby demonstrating the viability of BAE measurements for optical ultrasensitive measurements of motion and force in nanomechanical resonators.

quant-ph↗

Integrated gallium phosphide nonlinear photonics

Gallium phosphide (GaP) is an indirect bandgap semiconductor used widely in solid-state lighting. Despite numerous intriguing optical properties---including large $χ^{(2)}$ and $χ^{(3)}$ coefficients, a high refractive index ($>3$), and transparency from visible to long-infrared wavelengths ($0.55-11\,μ$m)---its application as an integrated photonics material has been little studied. Here we introduce GaP-on-insulator as a platform for nonlinear photonics, exploiting a direct wafer bonding approach to realize integrated waveguides with 1.2 dB/cm loss in the telecommunications C-band (on par with Si-on-insulator). High quality $(Q> 10^5)$, grating-coupled ring resonators are fabricated and studied. Employing a modulation transfer approach, we obtain a direct experimental estimate of the nonlinear index of GaP at telecommunication wavelengths: $n_2=1.2(5)\times 10^{-17}\,\text{m}^2/\text{W}$. We also observe Kerr frequency comb generation in resonators with engineered dispersion. Parametric threshold powers as low as 3 mW are realized, followed by broadband ($>100$ nm) frequency combs with sub-THz spacing, frequency-doubled combs and, in a separate device, efficient Raman lasing. These results signal the emergence of GaP-on-insulator as a novel platform for integrated nonlinear photonics.

physics.app-ph↗

Generalized dissipation dilution in strained mechanical resonators

Mechanical resonators with high quality factors are of relevance in precision experiments, ranging from gravitational wave detection and force sensing to quantum optomechanics. Beams and membranes are well known to exhibit flexural modes with enhanced quality factors when subjected to tensile stress. The mechanism for this enhancement has been a subject of debate, but is typically attributed to elastic energy being "diluted" by a lossless potential. Here we clarify the origin of the lossless potential to be the combination of tension and geometric nonlinearity of strain. We present a general theory of dissipation dilution that is applicable to arbitrary resonator geometries and discuss why this effect is particularly strong for flexural modes of nanomechanical structures with high aspect ratios. Applying the theory to a non-uniform doubly clamped beam, we show analytically how dissipation dilution can be enhanced by modifying the beam shape to implement "soft clamping", thin clamping and geometric strain engineering, and derive the ultimate limit for dissipation dilution.

physics.app-ph↗

Highly efficient 4 micron light generation through fs-fiber laser driven supercontinuum in Si$_3$N$_4$ waveguides

Directly accessing the middle infrared, the molecular functional group spectral region, via supercontinuum generation processes based on turn-key fiber lasers offers the undeniable advantage of simplicity and robustness. Recently, the assessment of the coherence of the mid-IR dispersive wave in silicon nitride waveguides, pumped at telecom wavelength, established an important first step towards mid-IR frequency comb generation based on such compact systems. Yet, the spectral reach and efficiency still fall short for practical implementation. Here, we experimentally demonstrate for the first time to our knowledge, that fs-fiber laser driven systems based on large-cross section silicon nitride waveguides can reach, with powers sufficient to drive dual-comb spectroscopy, the important greenhouse gases spectral region near 4 micron, typically accessed through different frequency generation or more complex approaches. We show, from a 2 micron femtosecond fiber laser, up to 30% power conversion and milliwatt-level output powers, proving that such sources are suitable candidate for compact, chip-integrated spectroscopic and sensing applications.

physics.optics↗

Double inverse nanotapers for efficient light coupling to integrated photonic devices

Efficient light coupling into integrated photonic devices is of key importance to a wide variety of applications. "Inverse nanotapers" are widely used, in which the waveguide width is reduced to match an incident mode. Here, we demonstrate novel, "double inverse" tapers, in which we taper both the waveguide height, as well as the width. We demonstrate that in comparison to regular inverse tapers, the double inverse tapers have excellent polarization-independent coupling. In addition, the optimum coupling is achieved with much larger taper dimension, enabling the use of photolithography instead of electron beam lithography, relevant for applications at near-IR and visible wavelengths. The low coupling loss makes them particularly suitable for nonlinear photonics, e.g. supercontinuum and soliton micro-comb generation.

physics.app-ph↗

Probing the loss origins of ultra-smooth $\mathrm{Si_3N_4}$ integrated photonic waveguides

On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear integrated photonic platforms still feature propagation losses orders of magnitude higher than in standard optical fiber. The tight confinement and high index contrast of integrated waveguides make them highly susceptible to fabrication induced surface roughness. Therefore, microresonators with ultra-high Q factors are, to date, only attainable in polished bulk crystalline, or chemically etched silica based devices, that pose however challenges for full photonic integration. Here, we demonstrate the fabrication of silicon nitride ($\mathrm{Si_3N_4}$) waveguides with unprecedentedly smooth sidewalls and tight confinement with record low propagation losses. This is achieved by combining the photonic Damascene process with a novel reflow process, which reduces etching roughness, while sufficiently preserving dimensional accuracy. This leads to previously unattainable \emph{mean} microresonator Q factors larger than $5\times10^6$ for tightly confining waveguides with anomalous dispersion. Via systematic process step variation and two independent characterization techniques we differentiate the scattering and absorption loss contributions, and reveal metal impurity related absorption to be an important loss origin. Although such impurities are known to limit optical fibers, this is the first time they are identified, and play a tangible role, in absorption of integrated microresonators. Taken together, our work provides new insights in the origins of propagation losses in $\mathrm{Si_3N_4}$ waveguides and provides the technological basis for integrated nonlinear photonics in the ultra-high Q regime.

physics.app-ph↗

Quantum-limited directional amplifiers with optomechanics

Directional amplifiers are an important resource in quantum information processing, as they protect sensitive quantum systems from excess noise. Here, we propose an implementation of phase-preserving and phase-sensitive directional amplifiers for microwave signals in an electromechanical setup comprising two microwave cavities and two mechanical resonators. We show that both can reach their respective quantum limits on added noise. In the reverse direction, they emit thermal noise stemming from the mechanical resonators and we discuss how this noise can be suppressed, a crucial aspect for technological applications. The isolation bandwidth in both is of the order of the mechanical linewidth divided by the amplitude gain. We derive the bandwidth and gain-bandwidth product for both and find that the phase-sensitive amplifier has an unlimited gain-bandwidth product. Our study represents an important step toward flexible, on-chip integrated nonreciprocal amplifiers of microwave signals.

cond-mat.mes-hall↗

Strain engineering for ultra-coherent nanomechanical oscillators

Elastic strain engineering utilizes stress to realize unusual material properties. For instance, strain can be used to enhance the electron mobility of a semiconductor, enabling more efficient solar cells and smaller, faster transistors. In the context of nanomechanics, the pursuit of resonators with ultra-high coherence has led to intense study of a complementary strain engineering technique, "dissipation dilution", whereby the stiffness of a material is effectively increased without added loss. Dissipation dilution is known to underlie the anomalously high Q factor of Si$_3$N$_4$ nanomechanical resonators, including recently-developed "soft-clamped" resonators; however, the paradigm has to date relied on weak strain produced during material synthesis. By contrast, the use of geometric strain engineering techniques -- capable of producing local stresses near the material yield strength -- remains largely unexplored. Here we show that geometric strain combined with soft-clamping can produce unprecedentedly high Q nanomechanical resonators. Specifically, using a spatially non-uniform phononic crystal pattern, we colocalize the strain and flexural motion of a Si$_3$N$_4$ nanobeam, while increasing the former to near the yield strength. This combined strategy produces string-like modes with room-temperature Q$\times$frequency products approaching $10^{15}$ Hz, an unprecedented value for a mechanical oscillator of any size. The devices we study can have force sensitivities of aN/rtHz, perform hundreds of quantum coherent oscillations at room temperature, and attain Q > 400 million at radio frequencies. These results signal a paradigm shift in the control of nanomechanical dissipation, with impact ranging from precision force microscopy to tests of quantum gravity. Combining the reported approach with crystalline or 2D materials may lead to further improvement, of as yet unknown limitation.

cond-mat.mes-hall↗

Excitonic emission of monolayer semiconductors near-field coupled to high-Q microresonators

We present quantum yield measurements of single layer $\textrm{WSe}_2$ (1L-$\textrm{WSe}_2$) integrated with high-Q ($Q>10^6$) optical microdisk cavities, using an efficient ($η>$90%) near-field coupling scheme based on a tapered optical fiber. Coupling of the excitonic emission is achieved by placing 1L-WSe$_2$ to the evanescent cavity field. This preserves the microresonator high intrinsic quality factor ($Q>10^6$) below the bandgap of 1L-WSe$_2$. The nonlinear excitation power dependence of the cavity quantum yield is in agreement with an exciton-exciton annihilation model. The cavity quantum yield is $\textrm{QY}_\textrm{c}\sim10^{-3}$, consistent with operation in the \textit{broad emitter} regime (i.e. the emission lifetime of 1L-WSe$_2$ is significantly shorter than the bare cavity decay time). This scheme can serve as a precise measurement tool for the excitonic emission of layered materials into cavity modes, for both in plane and out of plane excitation.

cond-mat.mes-hall↗

An Integrated-Photonics Optical-Frequency Synthesizer

Integrated-photonics microchips now enable a range of advanced functionalities for high-coherence applications such as data transmission, highly optimized physical sensors, and harnessing quantum states, but with cost, efficiency, and portability much beyond tabletop experiments. Through high-volume semiconductor processing built around advanced materials there exists an opportunity for integrated devices to impact applications cutting across disciplines of basic science and technology. Here we show how to synthesize the absolute frequency of a lightwave signal, using integrated photonics to implement lasers, system interconnects, and nonlinear frequency comb generation. The laser frequency output of our synthesizer is programmed by a microwave clock across 4 THz near 1550 nm with 1 Hz resolution and traceability to the SI second. This is accomplished with a heterogeneously integrated III/V-Si tunable laser, which is guided by dual dissipative-Kerr-soliton frequency combs fabricated on silicon chips. Through out-of-loop measurements of the phase-coherent, microwave-to-optical link, we verify that the fractional-frequency instability of the integrated photonics synthesizer matches the $7.0*10^{-13}$ reference-clock instability for a 1 second acquisition, and constrain any synthesis error to $7.7*10^{-15}$ while stepping the synthesizer across the telecommunication C band. Any application of an optical frequency source would be enabled by the precision optical synthesis presented here. Building on the ubiquitous capability in the microwave domain, our results demonstrate a first path to synthesis with integrated photonics, leveraging low-cost, low-power, and compact features that will be critical for its widespread use.

physics.app-ph↗