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arXiv · 0711.2263

High quality mechanical and optical properties of commercial silicon nitride membranes

B. M. Zwickl·W. E. Shanks·A. M. Jayich·C. Yang·A. C. Bleszynski Jayich·J. D. Thompson·J. G. E. Harris
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Abstract

We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices with comparable dimensions. The near-IR optical loss at 293 K is less than 2E-4. This combination of properties make these membranes attractive candidates for studying quantum effects in optomechanical systems.

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B. M. Zwickl, W. E. Shanks, A. M. Jayich, C. Yang, A. C. Bleszynski Jayich, J. D. Thompson, J. G. E. Harris. 2007-11-14. High quality mechanical and optical properties of commercial silicon nitride membranes. https://doi.org/10.1063/1.2884191

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