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arXiv · 1106.1327

Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

V. P. Kalinushkin·V. A. Yuryev·O. V. Astafiev·A. N. Buzynin·N. I. Bletskan
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Abstract

Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics

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V. P. Kalinushkin, V. A. Yuryev, O. V. Astafiev, A. N. Buzynin, N. I. Bletskan. 2011-06-07. Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics. https://doi.org/10.1557/proc-378-615

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