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arXiv · 1304.4367

Fast simulation method for parameter reconstruction in optical metrology

S. Burger·L. Zschiedrich·J. Pomplun·F. Schmidt·B. Bodermann
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Abstract

A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.

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S. Burger, L. Zschiedrich, J. Pomplun, F. Schmidt, B. Bodermann. 2013-04-16. Fast simulation method for parameter reconstruction in optical metrology. https://doi.org/10.1117/12.2011154

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