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arXiv · 1508.05275

Atomic layer deposited second order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

StÉphane Clemmen·Artur Hermans·Eduardo Solano·Jolien Dendooven·Kalle Koskinen·Martti Kauranen·Edouard Brainis·Christophe Detavernier·Roel Baets
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Abstract

We report the fabrication of artificial unidimensional crystals exhibiting an effective bulk second-order nonlinearity. The crystals are created by cycling atomic layer deposition of three dielectric materials such that the resulting metamaterial is non-centrosymmetric in the direction of the deposition. Characterization of the structures by second-harmonic generation Maker-fringe measurements shows that the main component of their nonlinear susceptibility tensor is about 5 pm/V which is comparable to well-established materials and more than an order of magnitude greater than reported for a similar crystal [1-Alloatti et al, arXiv:1504.00101[cond-mat.mtrl- sci]]. Our demonstration opens new possibilities for second-order nonlinear effects on CMOS-compatible nanophotonic platforms.

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StÉphane Clemmen, Artur Hermans, Eduardo Solano, Jolien Dendooven, Kalle Koskinen, Martti Kauranen, Edouard Brainis, Christophe Detavernier, Roel Baets. 2015-08-21. Atomic layer deposited second order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry. https://doi.org/10.1364/ol.40.005371

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