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arXiv · 1511.08395

Electron-beam-ignited, high-frequency-driven vacuum ultraviolet excimer light source

T. Dandl·H. Hagn·T. Heindl·R. Krücken·J. Wieser·A. Ulrich
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Abstract

Transformation of a table-top electron beam sustained 2.45 GHz RF discharge in rare gases into a self burning discharge has been observed for increasing RF-amplitude. Thereby, the emission spectrum undergoes significant changes in a wide spectral range from the vacuum ultraviolet (VUV) to the near infrared. A strong increase of VUV excimer emission is observed for the self burning discharge. The so called first excimer continuum, in particular, shows a drastic increase in intensity. For argon this effect results in a brilliant light source emitting near the 105 nm short wavelength cutoff of LiF windows. The appearance of a broad-band continuum in the UV and visible range as well as effects of RF excitation on the atomic line radiation and the so called third excimer continuum are briefly described.

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T. Dandl, H. Hagn, T. Heindl, R. Krücken, J. Wieser, A. Ulrich. 2015-11-26. Electron-beam-ignited, high-frequency-driven vacuum ultraviolet excimer light source. https://doi.org/10.1209/0295-5075%2F94%2F53001

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