arXiv · 1606.08802
Method for Transferring High-Mobility CVD-Grown Graphene with Perfluoropolymers
Abstract
The transfer of graphene grown by chemical vapor deposition (CVD) using amorphous polymers represents a widely implemented method for graphene-based electronic device fabrication. However, the most commonly used polymer, poly(methyl methacrylate) (PMMA), leaves a residue on the graphene that limits the mobility. Here we report a method for graphene transfer and patterning that employs a perfluoropolymer---Hyflon---as a transfer handle and to protect graphene against contamination from photoresists or other polymers. CVD-grown graphene transferred this way onto LaAlO$_3$/SrTiO$_3$ heterostructures is atomically clean, with high mobility (~30,000 cm$^2$V$^{-1}$s$^{-1}$) near the Dirac point at 2 K and clear, quantized Hall and magneto-resistance. Local control of the LaAlO$_3$/SrTiO$_3$ interfacial metal-insulator transition---through the graphene---is preserved with this transfer method. The use of perfluoropolymers such as Hyflon with CVD-grown graphene and other 2D materials can readily be implemented with other polymers or photoresists.
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Jianan Li, Jen-Feng Hsu, Hyungwoo Lee, Shivendra Tripathi, Qing Guo, Lu Chen, Mengchen Huang, Shonali Dhingra, Jung-Woo Lee, Chang-Beom Eom, Patrick Irvin, Jeremy Levy, Brian D'Urso. 2016-06-28. Method for Transferring High-Mobility CVD-Grown Graphene with Perfluoropolymers. https://arxiv.org/abs/1606.08802
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