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arXiv · 1608.08914

Fabrication of Ultrathin Single-Crystal Diamond Membranes

B. A. Fairchild·P. Olivero·S. Rubanov·A. D. Greentree·F. Waldermann·R. A. Taylor·I. Walmsley·J. M. Smith·S. Huntington·B. C. Gibson·D. N. Jamieson·S. Prawer
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Abstract

We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.

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B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, S. Prawer. 2016-08-31. Fabrication of Ultrathin Single-Crystal Diamond Membranes. https://doi.org/10.1002/adma.200801460

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