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arXiv · 1712.02918

On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency

Meiyong Liao·Liwen Sang·Tokuyuki Teraji·Satoshi Koizumi·Yasuo Koide
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Abstract

The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor integrability. We show a universal on-chip transduction scheme, which can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip MEMS/NEMS for any resonator.

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Meiyong Liao, Liwen Sang, Tokuyuki Teraji, Satoshi Koizumi, Yasuo Koide. 2018-05-18. On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency. https://arxiv.org/abs/1712.02918

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