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arXiv · 1811.05103

Hydrodynamic and Solid Mechanics Analysis of Capillary Force-Induced Mold Deformation in Sub-10 nm UV Nanoimprint Lithography

Jingxuan Cai·Wen-Di Li
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Abstract

A model has been developed to study the dynamic filling process and to investigate the capillary force-induced deformation of nanostructures on the imprint mold during ultraviolet nanoimprint lithography (UV-NIL) down to sub-10 nm resolution. The dynamic behavior of resist filling with varied physical parameters was investigated by a hydrodynamic model. The capillary force-induced deformation of mold structures was modeled using beam bending mechanics for both wetting and non-wetting mold structures. Theoretically calculated results were cross-validated with finite-element simulations using two-phase flow and solid mechanics methods. Based on the theoretical analysis, a general parameter of critical aspect ratio for design of imprint mold for UV-NIL is developed. The investigation of capillary force-induced deformation in UV-NIL helps to deepen the understanding of dynamic mechanism of resist filling and structural deformation at sub-10 nm scale and enable optimization for high-fidelity UV-NIL.

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Jingxuan Cai, Wen-Di Li. 2018-11-13. Hydrodynamic and Solid Mechanics Analysis of Capillary Force-Induced Mold Deformation in Sub-10 nm UV Nanoimprint Lithography. https://arxiv.org/abs/1811.05103

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