Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN

Risheng Cheng; Sihao Wang; Hong X. Tang

doi:10.1063/1.5131664

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arXiv · 1910.07010

Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN

Risheng Cheng·Sihao Wang·Hong X. Tang

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Abstract

High-quality ultra-thin films of niobium nitride (NbN) are developed by plasma-enhanced atomic layer deposition (PEALD) technique. Superconducting nanowire single-photon detectors (SNSPDs) patterned from this material exhibit high switching currents and saturated internal efficiencies over a broad bias range at 1550 nm telecommunication wavelength. Statistical analyses on hundreds of fabricated devices show near-unity throughput yield due to exceptional homogeneity of the films. The ALD-NbN material represents an ideal superconducting material for fabricating large single-photon detector arrays combining high efficiency, low jitter, low dark counts.

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Risheng Cheng, Sihao Wang, Hong X. Tang. 2019-11-26. Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN. https://doi.org/10.1063/1.5131664

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