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arXiv · 2007.02300

Stress-strain in electron-beam activated polymeric micro-actuators

Davide Giambastiani·Fabio Dispinzeri·Francesco Colangelo·Stiven Forti·Camilla Coletti·Alessandro Tredicucci·Alessandro Pitanti·Stefano Roddaro
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Abstract

Actuation of thin polymeric films via electron irradiation is a promising avenue to realize devices based on strain engineered two dimensional (2D) materials. Complex strain profiles demand a deep understanding of the mechanics of the polymeric layer under electron irradiation; in this article we report a detailed investigation on electron-induced stress on poly-methyl-methacrylate (PMMA) thin film material. After an assessment of stress values using a method based on dielectric cantilevers, we directly investigate the lateral shrinkage of PMMA patterns on epitaxial graphene, which reveals a universal behavior, independent of the electron acceleration energy. By knowing the stress-strain curve, we finally estimate an effective Young's modulus of PMMA on top of graphene which is a relevant parameter for PMMA based electron-beam lithography and strain engineering applications.

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Davide Giambastiani, Fabio Dispinzeri, Francesco Colangelo, Stiven Forti, Camilla Coletti, Alessandro Tredicucci, Alessandro Pitanti, Stefano Roddaro. 2020-07-05. Stress-strain in electron-beam activated polymeric micro-actuators. https://doi.org/10.1063/5.0021812

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