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arXiv · 2109.08649

Fabricacion de un magnetron sputtering para deposito de peliculas nanometricas magneticas

David Ley Dominguez·Cesar O. Romero·Giuseppe Pirruccio·Francisco Miguel Ascencio Aguirre·Ana Karla Bobadilla Valencia
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Abstract

This paper presents the development of scientific instrumentation for the fabrication of ferromagnetic thin films, by sputtering technique, for the use of 2-inch-diameter targets. Thin films were deposited using Permalloy alloy (Ni80Fe20) as ferromagnetic material at room temperature on Si (001) substrates. The film thicknesses were measured with profilometry and a deposition rate for this alloy of 16.2 nm/min was calculated. Scanning electron microscopy showed a continuous film formation and a chemical composition similar to the target

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David Ley Dominguez, Cesar O. Romero, Giuseppe Pirruccio, Francisco Miguel Ascencio Aguirre, Ana Karla Bobadilla Valencia. 2021-09-17. Fabricacion de un magnetron sputtering para deposito de peliculas nanometricas magneticas. https://arxiv.org/abs/2109.08649

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