Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing

Michael Rezac; Daniel Martinez; Amy Gleckl; Joshua R. Smith

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arXiv · 2202.12393

Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing

Michael Rezac·Daniel Martinez·Amy Gleckl·Joshua R. Smith

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Abstract

Air annealing generally reduces absorption, scattering, and mechanical loss in amorphous coatings up to temperatures where damage occurs. Our instrument uses an industrial oven with viewports to observe coating scatter and damage during annealing.

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Michael Rezac, Daniel Martinez, Amy Gleckl, Joshua R. Smith. 2022-02-19. Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing. https://arxiv.org/abs/2202.12393

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