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arXiv · 2204.07202

Simple coplanar waveguide resonator mask targeting metal-substrate interface

Cameron J. Kopas·Ella Lachman·Corey Rae H. McRae·Yuvraj Mohan·Josh Y. Mutus·Ani Nersisyan·Amrit Poudel
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Abstract

This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.

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Cameron J. Kopas, Ella Lachman, Corey Rae H. McRae, Yuvraj Mohan, Josh Y. Mutus, Ani Nersisyan, Amrit Poudel. 2022-04-14. Simple coplanar waveguide resonator mask targeting metal-substrate interface. https://arxiv.org/abs/2204.07202

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