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arXiv · 2208.14061

Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene

Suzanne Lancaster·Iciar Arnay·Ruben Guerrero·Adrían Gudín·Thomas Mikolajick·Paolo Perna·Stefan Slesazeck
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Abstract

Direct integration of ferroelectric Hf0.5Zr0.5O2 (HZO) on the inert surface of graphene is challenging. Here, using nucleation layers to promote atomic layer deposition of HZO was investigated. Different metals were deposited as nucleation layers via dc sputtering. Ta, which oxidizes in air to form a sub-stoichiometric oxide, was compared to Pt, which offers a more stable electrode. For thicker interlayers, Ta leads to unstable switching behavior of the HZO film. Conversely, at smaller thicknesses, a higher Pr can be achieved with an oxidized Ta interlayer. In both cases, Pt offers higher endurance. The choice of interlayer may strongly depend on the required application.

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Suzanne Lancaster, Iciar Arnay, Ruben Guerrero, Adrían Gudín, Thomas Mikolajick, Paolo Perna, Stefan Slesazeck. 2022-08-30. Optimizing nucleation layers for the integration of ferroelectric HZO on CVD-grown graphene. https://doi.org/10.1109/isaf51494.2022.9870121

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