arXiv · 2301.03897
Mechanical mode imaging of a high-Q hybrid hBN/Si$_3$N$_4$ resonator
Abstract
We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si$_3$N$_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the Si$_3$N$_4$ membrane. The measured resonance frequencies and spatial profiles of the modes are consistent with finite-element simulations based on an idealized geometry. Spectra of the thermal motion reveal that, depending on the degree of hybridization with modes of the heavier and higher-quality-factor Si$_3$N$_4$ membrane, the quality factors and the motional mass of the hBN drum modes can be shifted by orders of magnitude. This effect could be exploited to engineer hybrid drum/membrane modes that combine the low motional mass of 2D materials with the high quality factor of Si$_3$N$_4$ membranes for optomechanical or sensing applications.
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David Jaeger, Francesco Fogliano, Thibaud Ruelle, Aris Lafranca, Floris Braakman, Martino Poggio. 2023-01-10. Mechanical mode imaging of a high-Q hybrid hBN/Si$_3$N$_4$ resonator. https://doi.org/10.1021/acs.nanolett.3c00233
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