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arXiv · 2311.08694

Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC

Xingyu Du·Nishant Sharma·Zichen Tang·Chloe Leblanc·Deep Jariwala·Roy H. Olsson III
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Abstract

Surface Acoustic Wave (SAW) devices featuring Aluminum Scandium Nitride (AlScN) on a 4H-Silicon Carbide (SiC) substrate, offer a unique blend of high sound velocity, low thermal resistance, substantial piezoelectric response, simplified fabrication, as well as suitability for high-temperature and harsh environment operation. This study presents high-frequency SAW resonators employing AlScN thin films on SiC substrates, utilizing the second SAW mode (referred to as the Sezawa mode). The resonators achieve remarkable performance, boasting a K2 value of 5.5% and a maximum Q-factor (Qmax) of 1048 at 4.7 GHz, outperforming previous benchmarks. Additionally, a SAW resonator with a 960 nm wavelength attains 5.9 GHz frequency with record K2 (4.0%) and Qmax (887). Our study underscores the potential of the AlScN on SiC platform for advanced radio-frequency applications.

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Xingyu Du, Nishant Sharma, Zichen Tang, Chloe Leblanc, Deep Jariwala, Roy H. Olsson III. 2023-11-15. Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC. https://arxiv.org/abs/2311.08694

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