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arXiv · 2409.06838

An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications

Fabio Olivieri·Grayson M. Noah·Thomas Swift·M. Fernando Gonzalez-Zalba·John J. L. Morton·Alberto Gomez-Saiz
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Abstract

On-chip thermometry at deep-cryogenic temperatures is vital in quantum computing applications to accurately quantify the effect of increased temperature on qubit performance. In this work, we present a sub-1 K temperature sensor in CMOS technology based on the temperature dependence of the critical current of a superconducting (SC) thin-film. The sensor is implemented in 22-nm fully depleted silicon on insulator (FDSOI) technology and comprises a 6 nA resolution current-output digital-to-analog converter (DAC), a transimpedance amplifier (TIA) with a SC thin-film as a gain element, and a voltage comparator. The circuit dissipates 1.5 uW and is demonstrated operating at ambient temperatures as low as 15 mK, providing a variable temperature resolution reaching sub-10 mK.

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Fabio Olivieri, Grayson M. Noah, Thomas Swift, M. Fernando Gonzalez-Zalba, John J. L. Morton, Alberto Gomez-Saiz. 2024-09-10. An Integrated Deep-Cryogenic Temperature Sensor in CMOS Technology for Quantum Computing Applications. https://doi.org/10.1109/tasc.2025.3536636

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