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arXiv · 2605.12234

Characterization of large diameter ultra-thin vacuum windows for soft X-ray applications

K. Desch·E. Ferrer-Ribas·F. J. Iguaz·J. von Oy·A. Quintana·T. Schiffer
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Abstract

We present novel, ultra-thin, large-diameter silicon nitride windows for various soft X-ray applications. Together with the company NORCADA, we developed windows with 200 nm and 300 nm thickness withstanding pressure differences above 1 bar. The windows have an open diameter of 14 mm. They were intensively vacuum- and overpressure-tested, showing very good results. At a measurement campaign at the synchrotron radiation source SOLEIL in France, the transparency of the windows was measured over a range from 50 eV to 15 keV, giving results comparable with the expected transparencies.

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K. Desch, E. Ferrer-Ribas, F. J. Iguaz, J. von Oy, A. Quintana, T. Schiffer. 2026-05-12. Characterization of large diameter ultra-thin vacuum windows for soft X-ray applications. https://arxiv.org/abs/2605.12234

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