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arXiv · 2610.37130

Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters

Oleg A. Solovyev·Zakhar S. Enbaev·Alexander R. Shevchenko·Aleksander M. Mumlyakov·Pavel A. Berezhnoy·Mikael O. Geodakyan·Mikhail V. Tsvetkov·Michael A. Tarkhov·Igor V. Trofimov
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Abstract

A technology for the in situ formation of a three-layer TiN$_x$/Ti/TiN$_x$ functional material within a single vacuum cycle is presented, together with the results of investigations of its structural and electrophysical properties. The maximum critical power density reached approximately 140 MW/cm$^2$. Under continuous operation at 90% of the critical power, the structures remained operational for 24 h. The characteristics of microbridges without and with a protective SiO$_x$ layer were compared. The presence of the coating modifies the electrothermal operating regime of the structures and enables estimated temperatures of approximately 500-700 degrees Celsius to be reached.

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Oleg A. Solovyev, Zakhar S. Enbaev, Alexander R. Shevchenko, Aleksander M. Mumlyakov, Pavel A. Berezhnoy, Mikael O. Geodakyan, Mikhail V. Tsvetkov, Michael A. Tarkhov, Igor V. Trofimov. 2026-10-27. Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters. https://arxiv.org/abs/2610.37130

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