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arXiv · 1011.0254

On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator

Bei-Bei Li·Qing-Yan Wang·Yun-Feng Xiao·Xue-Feng Jiang·Yan Li·Lixin Xiao·Qihuang Gong
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Abstract

A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change of the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from red- to blue-shift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultra-high resolution of the thermal sensor is also analyzed to reach 10-4 K.

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Bei-Bei Li, Qing-Yan Wang, Yun-Feng Xiao, Xue-Feng Jiang, Yan Li, Lixin Xiao, Qihuang Gong. 2010-11-01. On chip, high-sensitivity thermal sensor based on high-Q polydimethylsiloxane-coated microresonator. https://doi.org/10.1063/1.3457444

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