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arXiv · 1303.1658

Ultra-Thin Free-Standing Single Crystalline Silicon Membranes With Strain Control

Andrey Shchepetov·Mika Prunnila·Francesc Alzina·Lars Schneider·John Cuffe·Hua Jiang·Esko I. Kauppinen·Clivia M. Sotomayor Torres·Jouni Ahopelto
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Abstract

We report on fabrication and characterization of ultra-thin suspended single crystalline flat silicon membranes with thickness down to 6 nm. We have developed a method to control the strain in the membranes by adding a strain compensating frame on the silicon membrane perimeter to avoid buckling of the released membranes. We show that by changing the properties of the frame the strain of the membrane can be tuned in controlled manner. Consequently, both the mechanical properties and the band structure can be engineered and the resulting membranes provide a unique laboratory to study low-dimensional electronic, photonic and phononic phenomena.

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Andrey Shchepetov, Mika Prunnila, Francesc Alzina, Lars Schneider, John Cuffe, Hua Jiang, Esko I. Kauppinen, Clivia M. Sotomayor Torres, Jouni Ahopelto. 2013-03-07. Ultra-Thin Free-Standing Single Crystalline Silicon Membranes With Strain Control. https://doi.org/10.1063/1.4807130

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