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arXiv · 1905.02420

Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering

Sharafat Ali·Biplab Paul·Roger Magnusson·Erik Ekstrom·Camille Pallier·Bo Jonson·Per Eklund·Jens Birch
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Abstract

In this work, amorphous thin films in Mg-Si-O-N system were prepared in order to investigate the dependence of optical and mechanical properties on Mg composition. Reactive RF magnetron co-sputtering from magnesium and silicon targets were used for the deposition of Mg-Si-O-N thin films. Films were deposited on float glass, silica wafers and sapphire substrates in an Ar, N2 and O2 gas mixture. X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, spectroscopic ellipsometry, and nanoindentation were employed to characterize the composition, surface morphology, and properties of the films.

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Sharafat Ali, Biplab Paul, Roger Magnusson, Erik Ekstrom, Camille Pallier, Bo Jonson, Per Eklund, Jens Birch. 2019-05-07. Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering. https://arxiv.org/abs/1905.02420

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