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arXiv · 2110.08987

A synchrotron-based kilowatt-level radiation source for EUV lithograph

Bocheng Jiang·Chao Feng·Changliang Li·Zhenghe Bai·Weishi Wan·Dao Xiang·Qiang Gu·Kun Wang·Qinglei Zhang·Dazhang Huang·Senyu Chen
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Abstract

A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.

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Bocheng Jiang, Chao Feng, Changliang Li, Zhenghe Bai, Weishi Wan, Dao Xiang, Qiang Gu, Kun Wang, Qinglei Zhang, Dazhang Huang, Senyu Chen. 2021-10-18. A synchrotron-based kilowatt-level radiation source for EUV lithograph. https://arxiv.org/abs/2110.08987

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