Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD

Katharina Dort; Rafael Ballabriga; Justus Braach; Eric Buschmann; Michael Campbell; Dominik Dannheim; Lennart Huth; Iraklis Kremastiotis; Jens Kröger; Lucie Linssen; Magdalena Munker; Walter Snoeys; Simon Spannagel; Peter Švihra; Tomas Vanat

doi:10.1016/j.nima.2022.167413

arXiv · 2204.10569

Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD

Katharina Dort·Rafael Ballabriga·Justus Braach·Eric Buschmann·Michael Campbell·Dominik Dannheim·Lennart Huth·Iraklis Kremastiotis·Jens Kröger·Lucie Linssen·Magdalena Munker·Walter Snoeys·Simon Spannagel·Peter Švihra·Tomas Vanat

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Abstract

Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge-collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution.

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Katharina Dort, Rafael Ballabriga, Justus Braach, Eric Buschmann, Michael Campbell, Dominik Dannheim, Lennart Huth, Iraklis Kremastiotis, Jens Kröger, Lucie Linssen, Magdalena Munker, Walter Snoeys, Simon Spannagel, Peter Švihra, Tomas Vanat. 2022-04-22. Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD. https://doi.org/10.1016/j.nima.2022.167413

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