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arXiv · 2307.05742

Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz

Jack Kramer·Vakhtang Chulukhadze·Kenny Huynh·Omar Barrera·Michael Liao·Sinwoo Cho·Lezli Matto·Mark S. Goorsky·Ruochen Lu
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Abstract

This work reports a 50.74 GHz lithium niobate (LiNbO3) acoustic resonator with a high quality factor (Q) of 237 and an electromechanical coupling (k2) of 5.17% resulting in a figure of merit (FoM, Q x k2) of 12.2. The LiNbO3 resonator employs a novel bilayer periodically poled piezoelectric film (P3F) 128 Y-cut LiNbO3 on amorphous silicon (a-Si) on sapphire stack to achieve low losses and high coupling at millimeter wave (mm-wave). The device also shows a Q of 159, k2 of 65.06%, and FoM of 103.4 for the 16.99 GHz tone. This result shows promising prospects of P3F LiNbO3 towards mm-wave front-end filters.

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Jack Kramer, Vakhtang Chulukhadze, Kenny Huynh, Omar Barrera, Michael Liao, Sinwoo Cho, Lezli Matto, Mark S. Goorsky, Ruochen Lu. 2023-07-11. Thin-Film Lithium Niobate Acoustic Resonator with High Q of 237 and k2 of 5.1% at 50.74 GHz. https://doi.org/10.1109/eftf%2Fifcs57587.2023.10272149

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