Quasioptic, Calibrated, Full 2-port Measurements of Cryogenic Devices under Vacuum in the 220-330 GHz Band

Abstract

A quasi-optical (QO) test bench was designed, simulated, and calibrated for characterizing S-parameters of devices in the 220-330 GHz (WR-3.4) frequency range, from room temperature down to 4.8 K. The devices were measured through vacuum windows via focused beam radiation. A de-embedding method employing line-reflect-match (LRM) calibration was established to account for the effects of optical components and vacuum windows. The setup provides all four S-parameters with the reference plane located inside the cryostat, and achieves a return loss of 30 dB with an empty holder. System validation was performed with measurements of cryogenically cooled devices, such as bare silicon wafers and stainless-steel frequency-selective surface (FSS) bandpass filters, and superconducting bandpass FSS fabricated in niobium. A permittivity reduction of Si based on 4-GHz resonance shift was observed concomitant with a drop in temperature from 296 K to 4.8 K. The stainless steel FSS measurements revealed a relatively temperature invariant center frequency and return loss level of 263 GHz and 35 dB on average, respectively. Finally, a center frequency of 257 GHz was measured with the superconducting filters, with return loss improved by 7 dB on average at 4.8 K. To the best of our knowledge, this is the first reported attempt to scale LRM calibration to 330 GHz and use it to de-embed the impact of optics and cryostat from cryogenically cooled device S-parameters.