CMOS based high-resolution dynamic X-ray imaging with inorganic perovskite

Abstract

High-resolution dynamic X-ray detector is crucial for time-resolved digital radiography (DR) imaging and fast 3D medical computed tomography (CT) imaging. Recently, perovskites have become promising alternatives to conventional semi-conductor materials, e.g., Si, a-Se and CdTe, for direct X-ray detection. However, the feasibility of their combination with high-speed pixelated complementary metal-oxide-semiconductor (CMOS) arrays remains unknown. This work originally reports an innovative direct-conversion X-ray detector fabricated with 300 micrometer thick inorganic perovskite film printed on a tailored CMOS array. In-house measurements demonstrate that the CsPbBr3 film has excellent optoelectric properties of an electron mobility-lifetime product of 3.40x10$^{-5}$ cm$^2$ V$^{-1}$, and the X-ray detector exhibits high sensitivity of 9341uC Gy$_{\rm air}^{-1}$ cm$^{-2}$, and low detection limit of 588 nGy$_{\rm air}^{-1}$. This CMOS X-ray imaging detector achieves a high spatial resolution up to 5.5 lp/mm (close to the resolution limit of 6.0 lp/mm), and >300 frame per second (fps) readout speed. DR image of a resolution pattern phantom and a anesthesia mice, CT images of a biological specimen are acquired for the first time.