Dielectric Deposition Enhanced Crystallization in Atomic-Layer-Deposited Indium Oxide Transistors Achieving High Gated-Hall Mobility Exceeding 100 cm2/Vs at Room Temperature

Abstract

In this work, we report high-performance atomic-layer-deposited indium oxide (In2O3) transistors with high gated-Hall mobility ({\mu}H) exceeding 100 cm2/Vs at room temperature (RT). It is found that the deposition of top hafnium oxide (HfO2) above the In2O3 channel significantly enhances its crystallization, leading to an average grain size of 97.2 nm in a 4.2-nm In2O3 channel. The ALD of In2O3 exhibits an epitaxy-like growth behavior, with its (222) planes aligning parallel to the (111) planes of both the top and bottom HfO2 dielectrics. As a result, bottom-gate In2O3 transistors with a high {\mu}H of 100.9 cm2/Vs and a decent subthreshold swing (SS) of 94 mV/dec are achieved by gated-Hall measurement at RT. Furthermore, the devices maintain excellent performance at low temperatures, achieving a {\mu}H of 162.2 cm2/Vs at 100 K. Our study reveals the critical role of dielectric deposition induced crystallization in enhancing carrier transport and offers a scalable pathway toward high-mobility devices.